基于ScAlN薄膜的超高频声表面波谐振器的构建与损耗机理研究

11904233
2019
A2306.声材料、换能器和测量
张巧珍
青年科学基金项目
副教授
上海师范大学
25万元
损耗机理;掺钪氮化铝薄膜;声表面波;压电层状结构;微声器件
2020-01-01到2022-12-31
  • 中英文摘要
  • 结题摘要
  • 结题报告
  • 项目成果
  • 项目参与人
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序号 标题 类型 作者
1 Hybrid Full-Wave Analysis of Surface Acoustic Wave Devices for Accuracy and Fast Performance Prediction 期刊论文 Zhenglin Chen;Qiaozhen Zhang;Sulei Fu;Xiaoyu Wang;Xiaojun Qiu;Xiaoyu Wang
2 Design and analysis of piezoelectric micromachined ultrasonic transducer using high coupling PMN-PT single crystal thin film for ultrasound imaging 期刊论文 Mingzhu Chen;Qiaozhen Zhang;Xiangyong Zhao;Feifei Wang;Huiling Liu;Baichuan Li;Xiangfen Zhang;Haosu Luo
3 Surface acoustic wave pressure sensor on ScAlN/3C-SiC/Si layer structure incorporating biomimetic microcantilever: modelling and performance enhancement 期刊论文 Qiaozhen Zhang;Xiangyong Zhao;Feifei Wang;Yang Luo;Hongwei Mao;Tao Han
4 Highly coupled leaky surface acoustic wave on hetero acoustic layer structures based on ScAlN thin films with a c-axis tilt angle 期刊论文 Huiling Liu;Qiaozhen Zhang;Xiangyong Zhao;Feifei Wang;Mingzhu Chen;Baichuan Li;Sulei Fu;Wei-biao Wang
5 A Weak Form Nonlinear Model for Thermal Sensitivity of Love Wave Mode on Layered Structures 期刊论文 Yang Yang;Harshad Mishra;Qiaozhen Zhang;Sami Hage-Ali;Tao Han;Omar Elmazria
6 一种适用于高频、宽带声表面波器件的异质层状压电基底 专利 张巧珍;刘会灵;赵祥永
7 Periodic Analysis of Surface Acoustic Wave Resonator with Dimensionally Reduced PDE Model Using COMSOL Code 期刊论文 Qiaozhen Zhang;Zhenglin Chen;Yanguang Chen;Jiahe Dong;Panliang Tang;Sulei Fu;Xiaoyu Wang;Jinyi Ma;Xiangyong Zhao
8 High Performance Coupled BAW/SAW Resonator Using ScAlN/AlN Thin Film Hetero Acoustic Layered (HAL) Structure 会议论文 HuiLing Liu;QiaoZhen Zhang;XiangYong Zhao;SuLei Fu;WeiBiao Wang
9 射频 SAW 器件非线性信号的测量及产生机制分析 期刊论文 李百川;罗 阳;傅肃磊;王为标;张巧珍
10 Theoretical analysis of high electromechanical coupling surface acoustic wave propagating on lead-free Na0.5Bi0.5TiO3–BaTiO3 single crystal 期刊论文 Qingxiu Xie;Yuqing Hu;Xiangyong Zhao;Feifei Wang;Yanxue Tang;Qiaozhen Zhang;Mingzhu Chen;Wangzhou Shi;Di Lin;Haosu Luo
11 Ultra-wide band and improved quality factor SH-type SAW devices by employing Mn-doped Pb(In1/2Nb1/2)O3– Pb(Mg1/3Nb2/3)O3–PbTiO3 thin film/diamond layered structure 期刊论文 Jian Wang;Qiaozhen Zhang;Xiangyong Zhao;Huiling Liu;Songsong Zhang;Yuandong Gu
12 Piezoelectric acoustic wave characteristics of Pb(In0.5Nb0.5)O3-Pb(Mg1/3Nb2/3)O3-PbTiO3 single crystal substrate: A comparative study with and without SiO2 overlay 期刊论文 Qiaozhen Zhang;Rufan Du;Baichuan Li;Huiling Liu;Xiangyong Zhao;Ziyun Chen;Haosu Luo
13 A General Fem model for Analysis of Nonlinearity in RF Baw Devices 会议论文 Bai-chuan Li;Qiaozhen Zhang;Huiling Liu;Xiang-yong Zhao;Su-lei Fu;Wei-biao Wang
14 Geometric Nonlinear Model for Prediction of Frequency–Temperature Behavior of SAW Devices for Nanosensor Applications 期刊论文 Zhenglin Chen;Qiaozhen Zhang;Congcong Li;Sulei Fu;Xiaojun Qiu;Xiaoyu Wang;Haodong Wu
15 一种SAW-BAW混合谐振器 专利 张巧珍;刘会灵;赵祥永;陈正林
16 Deposition, Characterization, and Modeling of Scandium-Doped Aluminum Nitride Thin Film for Piezoelectric Devices 期刊论文 Qiaozhen Zhang;Mingzhu Chen;Huiling Liu;Xiangyong Zhao;Xiaomei Qin;Feifei Wang;Yanxue Tang;Keat Hoe Yeoh;Khian-Hooi Chew;Xiaojuan Sun
17 A General FEM Model for Analysis of Third-Order Nonlinearity in RF Surface Acoustic Wave Devices Based on Perturbation Theory 期刊论文 Baichuan Li;Qiaozhen Zhang;Xiangyong Zhao;Shaotao Zhi;Luyan Qiu;Sulei Fu;Weibiao Wang
18 用于射频滤波器的LN单晶薄膜XBAR的性能研究 期刊论文 杜如帆;田亚会;张巧珍;李百川;李红浪
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