氨浴法阴离子掺杂有源层的氧化物TFT缺陷态与稳定性研究

61804093
2018
F0404.半导体电子器件与集成
丁星伟
青年科学基金项目
副研究员
上海大学
25万元
金属氧化物薄膜晶体管;稳定性;态密度;氨浴;N掺杂
2019-01-01到2021-12-31
  • 中英文摘要
  • 结题摘要
  • 结题报告
  • 项目成果
  • 项目参与人
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1 Low-Voltage Hf-ZnO Thin Film Transistors With Ag Nanowires Gate Electrode and Their Application in Logic Circuit 期刊论文 Wu Jialong;Yang Jun;Yang Xuyong;Ding Xingwei
2 Low-temperature combustion synthesis and UV treatment processed p-type Li:NiOx active semiconductors for high-performance electronics 期刊论文 Yang Jun;Wang Bowen;Zhang Yongpeng;Ding Xingwei;Zhang Jianhua
3 一种采用原子层沉积技术沉积氧化物薄膜的装置及方法 专利 丁星伟;李春亚;魏斌
4 Temperature Gradient ZnO Deposited via ALD for High-Performance Transistor Applications 期刊论文 Che Bowen;Zhang Hao;Yang Jun;Qi Jie;Ding Xingwei;Zhang Jianhua
5 A Study on Solution-Processed Y2O3 Films Modified by Atomic Layer Deposition Al2O3 as Dielectrics in ZnO Thin Film Transistor 期刊论文 Xu Haiyang;Ding Xingwei;Qi Jie;Yang Xuyong;Zhang Jianhua
6 一种基于ALD技术制备氧化锌薄膜的装置及方法 专利 丁星伟;李春亚;张建华
7 Enhanced Stability in Zr-Doped ZnO TFTs With Minor Influence on Mobility by Atomic Layer Deposition 期刊论文 Yang Jun;Zhang Yongpeng;Qin Cunping;Ding Xingwei;Zhang Jianhua
8 High-Performance 1-V ZnO Thin-Film Transistors With Ultrathin, ALD-Processed ZrO2 Gate Dielectric 期刊论文 Yang Jun;Zhang Yongpeng;Wu Qianqian;Dussarrat Christian;Qi Jie;Zhu Wenqing;Ding Xingwei;Zhang Jianhua
9 Low-Temperature Fabrication of IZO Thin Film for Flexible Transistors 期刊论文 Ding Xingwei;Yang Bing;Xu Haiyang;Qi Jie;Li Xifeng;Zhang Jianhua
10 A New "Ammonia Bath" Method for Realizing Nitrogen Doping in ZnSnO Transistors 期刊论文 Zhang Yongpeng;Zhang Hao;Che Bowen;Yang Jun;Zhang Jianhua;Ding Xingwei
11 Solution-Processed Yttrium-Doped IZTO Semiconductors for High-Stability Thin Film Transistor Applications 期刊论文 Zhang Yongpeng;Zhang Hao;Yang Jun;Ding Xingwei;Zhang Jianhua
12 Photoresponses Improvement of ZnO Thin Film Transistor by Using a HfO2-Al2O3 Double Dielectrics 会议论文 Che Bowen;Zhang Yongpeng;Ding Xingwei
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