基于X射线诱发激进粒子反应机制的短波增反膜表面碳沉积原位、高效、无损清洗方法的研究
61974142
2019
F0406.集成电路器件、制造与封装
龚学鹏
面上项目
研究员
中国科学院长春光学精密机械与物理研究所
59万元
极紫外光刻;原位清洗;碳沉积;激进粒子;X射线
2020-01-01到2023-12-31
- 中英文摘要
- 结题摘要
- 结题报告
- 项目成果
- 项目参与人
查看更多信息请先登录或注册
查看更多信息请先登录或注册
查看更多信息请先登录或注册
| 序号 | 标题 | 类型 | 作者 |
|---|---|---|---|
| 1 | A new active vibration control method of double crystal monochromator based on FuLMS-ADRC hybrid algorithm | 期刊论文 | Yang Bai;Xuepeng Gong;Qipeng Lu;Yuan Song;Dazhuang Wang;Zhongqi Peng;Zhen Zhang;Qijun Mao;Tianyu Ma |
| 2 | Detection of carbon contamination in EUV multilayer mirrors based on secondary electrons | 期刊论文 | Chai Kewei;Lu Qipeng;Song Yuan;Gong Xuepeng;Li Ao;Zhang Zhen |
| 3 | 一种真空条件下光学元件多自由度精密定位装置 | 专利 | 王依;卢启鹏;龚学鹏;宋源 |
| 4 | Study on the characteristics of atomic hydrogen cleaning carbon contamination on multilayers | 期刊论文 | Yuan Song;Qipeng Lu;Xuepeng Gong;Dazhuang Wang;Zhen Zhang;Bo Yu;Shun Yao;Qijun Mao;Tianyu Ma;Yang Bai |
| 5 | Research on an active control method of double crystal monochromator with disturbance observer | 期刊论文 | Yang Bai;Xuepeng Gong;Qipeng Lu;Shengchi Li;Yuan Song;Zhongqi Peng;Zhen Zhang |
| 6 | Application of adaptive filtering algorithm to the stability problem for double crystal monochromator Part II: Hybrid algorithms | 期刊论文 | Bai Yang;Gong Xuepeng;Lu Qipeng;Song Yuan;Zhu Wanqian;Xue Song;Wang Dazhuang;Peng Zhongqi;Zhang Zhen |
| 7 | Research on efficient and stable control of EUV-induced hydrogen plasma | 期刊论文 | Qijun Mao;Xuepeng Gong;Qipeng Lu;Yuan Song;Dazhuang Wang;Yang Bai;Tianyu Ma |
| 8 | 一种流量稳定的EUV碳污染实验气体供气装置 | 专利 | 宋源;卢启鹏;龚学鹏;王依;彭忠琦;徐彬豪;赵晨行 |
| 9 | 一种双驱动非等力矩的压弯装置和压弯方法 | 专利 | 卢启鹏;马天宇;彭忠琦;王大壮;龚学鹏;宋源;张振 |
| 10 | 振动控制装置及控制方法 | 专利 | 龚学鹏;白洋;卢启鹏;宋源;王大壮;彭忠琦;毛琪俊;马天宇 |
| 11 | Application of adaptive filtering algorithm to the stability problem for double crystal monochromator. Part I: Typical filtering algorithms | 期刊论文 | Bai Yang;Gong Xuepeng;Lu Qipeng;Song Yuan;Zhu Wanqian;Xue Song;Wang Dazhuang;Peng Zhongqi;Zhang Zhen |
| 12 | Design optimization of broadband extreme ultraviolet polarizer in high-dimensional objective space | 期刊论文 | Kuang Shang-qi;Li Bo-chao;Wang Yi;Gong Xue-peng;Lin Jing-quan |
| 13 | Adaptive vibration control method for double-crystal monochromator base on VMD and FxNLMS | 期刊论文 | Yang Bai;Xuepeng Gong;Qipeng Lu;Yuan Song;Wanqian Zhu;Song Xue;Dazhuang Wang;Zhongqi Peng;Zhen Zhang |
| 14 | Active vibration control method of double crystal monochromator of P2 protein crystallography beam line at SSRF | 期刊论文 | Bai Yang;Gong Xuepeng;Lu Qipeng;Song Yuan;Wang Dazhuang;Peng Zhongqi;Zhang Zhen;Mao Qijun;Ma Tianyu |
| 15 | Stability control method of double crystal monochromator based on hybrid control algorithm | 期刊论文 | Yang Bai;Xuepeng Gong;Qipeng Lu;Yuan Song;Wanqian Zhu;Song Xue;Dazhuang Wang;Zhongqi Peng;Zhen Zhang |
| 16 | 振动控制方法 | 专利 | 龚学鹏;白洋;卢启鹏;宋源;王大壮;彭忠琦;毛琪俊;马天宇 |
| 17 | 一种高效收集EUV光的多层膜光学元件碳污染实验装置 | 专利 | 宋源;卢启鹏;龚学鹏;王依;彭忠琦;徐彬豪;赵晨行 |
查看更多信息请先登录或注册
