复合刻蚀诱导熔石英表面氧空位缺陷演变及损伤性能提升机制研究

61705206
2017
F0508.应用光学
孙来喜
青年科学基金项目
副研究员
中国工程物理研究院激光聚变研究中心
24万元
表面质量;亚表面缺陷;表面粗糙度;低温等离子体;亚表面损伤
2018-01-01到2020-12-31
  • 中英文摘要
  • 结题摘要
  • 结题报告
  • 项目成果
  • 项目参与人
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序号 标题 类型 作者
1 Theoretical and Experimental Research on Laser-Induced Damage of Fused Silica Optics Due to Stimulated Brillouin Scattering 期刊论文 Sun Laixi;Ni Ruifang;Xia Handing;Shao Ting;Huang Jin;Ye Xin;Jiang Xiaodong;Cao Linhong
2 Effects of combined process of reactive ion etching and dynamic chemical etching on UV laser damage resistance and surface quality of fused silica optics 期刊论文 Sun Laixi;Huang Jin;Shao Ting;Ye Xin;Li Qingzhi;Jiang Xiaodong;Wu Weidong;Yang Liming;Zheng Wanguo
3 Effect of PVA coating on the electric field intensity distribution and laser damage performance of fused silica optics surfaces 期刊论文 Li Changpeng;Li Qingzhi;Sun Laixi;Ye Xin;Chen Shufan;Wu Zhiqing;Huang Jin;Wu Weidong;Jiang Xiaodong
4 Ultraviolet Laser Damage Dependence on Contamination Concentration in Fused Silica Optics during Reactive Ion Etching Process 期刊论文 Sun Laixi;Shao Ting;Shi Zhaohua;Huang Jin;Ye Xin;Jiang Xiaodong;Wu Weidong;Yang Liming;Zheng Wanguo
5 Understanding the role of fluorine-containing plasma on optical properties of fused silica optics during the combined process of RIE and DCE 期刊论文 Shao Ting;Sun Laixi;Li Weihua;Zhou Xiaoyan;Wang Fengrui;Huang Jin;Ye Xin;Yang Liming;Zheng Wanguo
6 KOH-based shallow etching for exposing subsurface damage and increasing laser damage resistance of fused silica optical surface 期刊论文 Sun Laixi;Shao Ting;Zhou Xinda;Li Fenfei;Chen Shufan;Li Weihua;Ye Xin;Huang Jin;Li Bo;Yang Liming;Zheng Wanguo
7 Fabrication and properties of broadband antireflective coatings on inert perfluoropolymer films treated by inductively coupled oxygen plasma 期刊论文 Sun Laixi;Chen Shufan;Yang Fan;Ye Xin;Jiang Xiaodong;Wu Weidong
8 Fabrication of Antireflective Nanostructures on a Transmission Grating Surface Using a One-Step Self-Masking Method 期刊论文 Shao Ting;Tang Feng;Sun Laixi;Ye Xin;He Junhui;Yang Liming;Zheng Wanguo
9 Traceless mitigation of laser damage precursors on a fused silica surface by combining reactive ion beam etching with dynamic chemical etching 期刊论文 Sun Laixi;Shao Ting;Xu Jianfeng;Zhou Xiangdong;Ye Xin;Huang Jin;Bai Jian;Jiang Xiaodong;Zheng Wanguo;Yang Liming
10 Plasma-Induced, Self-Masking, One-Step Approach to an Ultrabroadband Antireflective and Superhydrophilic Subwavelength Nanostructured Fused Silica Surface 期刊论文 Ye Xin;Shao Ting;Sun Laixi;Wu Jingjun;Wang Fengrui;He Junhui;Jiang Xiaodong;Wu Wei Dong;Zheng Wanguo
11 Convenient and Efficient Fabrication of Colloidal Crystals Based on Solidification-Induced Colloidal Assembly 期刊论文 Shao Ting;Sun Laixi;Yang Chun;Ye Xin;Chen Shufan;Luo Xuan
12 Growth mechanism of one-step self-masking reactive-ion-etching (RIE) broadband antireflective and superhydrophilic structures induced by metal nanodots on fused silica 期刊论文 Wu Jingjun;Ye Xin;Sun Laixi;Huang Jin;Wen Jibin;Geng Feng;Zeng Yong;Li Qingzhi;Yi Zao;Jiang Xiaodong;Zhang Kuibao
13 Fabrication and characterisation of geometry-controlled Cu microwires in porous poly(methyl methacrylate) templates using melt co-drawing and electrochemical deposition techniques 期刊论文 Yang Bo;Sun Laixi;Wei Wei;Niu Gao;Chen Shufan;Wu Weidong;Li Bo
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