浸没流场及纳米气泡对45纳米光刻分辩率的影响

91023015
2010
E0502.传动与驱动
付新
重大研究计划
教授
浙江大学
50万元
浸没流场;浸没式光刻;45纳米分辩率;纳米气泡
2011-01-01到2013-12-31
  • 中英文摘要
  • 结题摘要
  • 结题报告
  • 项目成果
  • 项目参与人
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序号 标题 类型 作者
1 Preliminary study on development of PVDF nanofiber based energy harvesting device for an artery microrobot 期刊论文 Liu, Weiting|Cheng, Xiaoying|Fu, Xin|Stefanini, Cesare|Dario, Paolo|
2 Analysis on heat resistance of the micro heat pipe with arteries 期刊论文 Liu, Weiting|Kang, Jian|Fu, Xin|Stefanini, Cesare|Dario, Paolo|
3 Investigation on vibration of immersion unit in immersion lithography 会议论文 Shen, Yingnan|Chen, Wenyu|Fu, Xin|
4 The acoustics of cavitation in spool valve with U-notches 期刊论文 Lu, Liang|Zou, Jun|Fu, Xin|
5 Experimental characterization of gas jet impinging onto liquid film relevant to air sealing in immersion lithography 会议论文 Liu, Qi|Chen, Wenyu|Fu, Xin|
6 Particle removal in the tube with single cavitation bubble 会议论文 Xu, Ming|Zou, Jun|Ji, Chen|Fu, Xin|
7 Lens distortion for liquid renovation in immersion lithography 期刊论文 Chen, Hui|Chen, Wenyu|Zou, Jun|Fu, Xin|
8 3-DOF Measuring system of large area gap for lithography 会议论文 Shao, Jiejie|Chen, Wenyu|Fu, Xin|
9 Large bubble entrapment during drop impacts on a restricted liquid surface 期刊论文 Zou, Jun|Ji, Chen|Yuan, Baogang|Ren, Yuliang|Ruan, Xiaodong|Fu, Xin|
10 Analytical Magnetic Field and Driving Force Models Based on Measured Boundary Conditions for Industrial Coriolis Mass Flowmeters 期刊论文 Wang, Lijun|Hu, Liang|Lee, Kok-Meng|Ruan, Xiaodong|Fu, Xin|
11 Lumped-parameter modeling of an immersion flow field for analyzing meniscus dynamic behavior 期刊论文 Chen, Ying|Lee, Kok-Meng|Lin, Chun-Yeon|Fu, Xin|
12 Particle removal by a single cavitation bubble 期刊论文 Xu, Ming|Ji, Chen|Zou, Jun|Ruan, Xiaodong|Fu, Xin|
13 Effect of upper surface characteristics on meniscus stability in immersion flow field 期刊论文 Chen, Ying|Lee, Kok-Meng|Fu, Xin|
14 Lumped-parameter modeling for meniscus dynamic analysis in immersion flow field 会议论文 Chen, Ying|Lee, Kok-Meng|Lin, Chun-Yeon|Fu, Xin|
15 Experimental research on thermo-direct fiber drawing technique 期刊论文 Fu, Xin|Li, Fei|Liu, Weiting|Stefanini, Cesare|Dario, Paolo|
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