多场耦合控制磨料状态的新一代光电晶片超光滑平坦化加工理论与关键技术研究

U1801259
2018
阎秋生
联合基金项目
教授
广东工业大学
255万元
多场耦合控制磨料;动态电磁流变效应;光电晶片;超光滑平坦化;表面完整性
2019-01-01到2022-12-31
  • 中英文摘要
  • 结题摘要
  • 结题报告
  • 项目成果
  • 项目参与人
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序号 标题 类型 作者
1 磁场分布对多磨头磁流变抛光材料去除的影响 期刊论文 路家斌;宾水明;阎秋生;黄银黎;熊强
2 基于磁控磨料定向的SiC固相芬顿反应研抛盘制备及性能研究 期刊论文 路家斌;曾帅;阎秋生;熊强;邓家云
3 Processing properties for the Si-face of the 4H-SiC substrates using the magnetically-controlled abrasive solidification orientation–solid-phase Fenton reaction for the fabrication of the lapping–polishing plate 期刊论文 Jiayun Deng;Jiabin Lu;Shuai Zeng;Qiusheng Yan;Jisheng Pan
4 A Nanomechanical Analysis of Deformation Characteristics of 6H-SiC Using an Indenter and Abrasives in Different Fixed Methods 期刊论文 Jisheng Pan;Qiusheng Yan;Weihua Li;Xiaowei Zhang
5 Scratch Morphology Transformation: An Alternative Method of Scratch Processing on Optical Surface 期刊论文 Guangqi Zhou;Ye Tian;Feng Shi;Ci Song;Guipeng Tie;Shijie Liu;Gang Zhou;Jianda Shao;Zhouling Wu
6 陶瓷结合剂研磨盘制备及研磨蓝宝石性能研究 期刊论文 路家斌;聂小威;阎秋生;陈海阳
7 Study on the Repair Technology of Laser Damage-Fused Silica Optics Based on the Neural Network Method 期刊论文 Bo Wang;Wanli Zhang;Feng Shi;Ci Song;Yaofei Zhang;Guoyan Sun;Shuangpeng Guo
8 羟基自由基高级氧化技术应用进展综述 期刊论文 潘继生;邓家云;张棋翔;阎秋生
9 第二十三届中国专利银奖《磁流变柔性抛光垫的动态磁场自锐抛光装置及其抛光方法》 奖励 潘继生;阎秋生;高伟强;于鹏
10 The influences of technological parameters on the ultraviolet photocatalytic reaction rate and photocatalysis-assisted polishing effect for SiC 期刊论文 Qiusheng Yan;Xin Wang;Qiang Xiong;Jiabin Lu;Botao Liao
11 集群磁流变变间隙动压平坦化加工试验研究 期刊论文 阎秋生;廖博涛;路家斌;付有志
12 Chemical mechanical polishing exploiting metal electrochemical corrosion of single-crystal SiC 期刊论文 Yingrong Luo;Qiang Xiong;Jiabin Lu;Qiusheng Yan;Da Hu
13 Preparation and processing properties of magnetically controlled abrasive solidification orientation—solid-phase Fenton reaction lapping-polishing plate for single-crystal 4H-SiC 期刊论文 Jiayun Deng;Lu Jing;Shuai Zeng;Qiang Xiong;Qiusheng Yan;Jisheng Pan
14 Interferometric stitching method for testing cylindrical surfaces with large apertures 期刊论文 Shuai Xue;Yifan Dai;Shengyue Zeng;Shanyong Chen;Ye Tian;Feng Shi
15 单晶SiC基片的化学机械抛光技术研究进展 期刊论文 邓家云;潘继生;张棋翔;郭晓辉;阎秋生
16 蓝宝石基片的单面研磨工艺研究 期刊论文 潘继生;郑坤;廖博涛;阎秋生
17 6H-SiC单晶紫外光催化抛光中光照方式和磨料的影响 期刊论文 路家斌;熊强;阎秋生;王鑫;宾水明
18 A new predictive method of the finished surface profile in abrasive flow machining process 期刊论文 Youzhi Fu;Hang Gao;Yan Qiusheng;Xuanping Wang
19 一种超光滑平坦化抛光方法及装置 专利 潘继生;阎秋生;蔡志航;洪志清;陈海阳;梁智镔
20 一种半导体基片用声光磁复合抛光装置 专利 卓志佳;潘继生;阎秋生
21 一种磁场动态叠加的磁流变抛光装置及抛光方法. 专利 梁智镔;阎秋生;潘继生
22 一种电磁耦合抛光设备以及电磁耦合控制磨粒状态的抛光方法 专利 潘继生;黄展亮;阎秋生;罗斌
23 一种聚焦超声磁流变复合抛光方法及装置 专利 潘继生;向民;阎秋生
24 一种基于扩展式磁流变抛光的励磁装置 专利 石峰;张万里;戴一帆;胡皓;宋辞;钟曜宇
25 一种金刚石晶片超精密加工方法及装置 专利 路家斌;刘文涛;熊强;邓家云;阎秋生;王新汉
26 一种可冲退磁的磁盘 专利 蔡志航;潘继生;阎秋生;陈海阳
27 一种摩擦磨损检测装置 专利 潘继生;阎秋生;席兴文;洪志清;陈海阳
28 一种半导体晶片磁控研磨和抛光一体盘及其使用方法 专利 熊强;路家斌;阎秋生;骆应荣;胡达
29 Tribological behavior of single crystal diamond based on UV photocatalytic reaction 期刊论文 Wentao Liu;Qiang Xiong;Jiabin Lu;Xinhan Wang;Qiusheng Yan
30 Key technology research on magnetorheological finishing based on suppression of surface mid-spatial frequency ripple errors 期刊论文 Bo Wang;Feng Shi;Wanli Zhang;Guipeng Tie;Ci Song;Shuangpeng Guo
31 Design of arrayed magnetorheological equipment applied in optics manufacture 期刊论文 Wanli Zhang;Feng Shi;Ci Song;Guipeng Tie;Bo Wang;Shuo Qiao;Guoyan Sun
32 Characterization of Fenton reaction-based material removal on single crystal diamond surface 期刊论文 Xinhan Wang;Qiang Xiong;Jiabin Lu;Qiusheng Yan;Wentao Liu
33 Basic research on chemical mechanical polishing of single-crystal SiC—Electro–Fenton: Reaction mechanism and modelling of hydroxyl radical generation using condition response modelling 期刊论文 Jiayun Deng;Jiabin Lu;Qiusheng Yan;Jisheng Pan
34 Material removal behaviour in axial ultrasonic assisted scratching of Zerodur and ULE with a Vickers indenter 期刊论文 Guoyan Sun;Feng Shi;Qingliang Zhao;Zhen Ma;Donglai Yang
35 Effect on nanoscale damage precursors of fused silica with wet etching in KOH solutions 期刊论文 Yaoyu Zhong;Yifan Dai;Ye Tian;Feng Shi
36 An efficient approach to improving the finishing properties of abrasive flow machining with the analyses of initial surface texture of workpiece 期刊论文 Youzhi Fu;Hang Gao;Qiusheng Yan;Xuanping Wang;Xu Wang
37 The Cause of Ribbon Fluctuation in Magnetorheological Finishing and Its Influence on Surface Mid-Spatial Frequency Error 期刊论文 Bo Wang;Feng Shi;Guipeng Tie;Wanli Zhang;Ci Song;Ye Tian;Yongxiang Shen
38 Influences of processing parameters on metal-bonded diamond wheel wear when grinding a sapphire wafer 期刊论文 Bin Luo;Qiusheng Yan;Jisheng Pan;Jiabin Lu;Zhanliang Huang
39 Scratch Behaviour of Bulk Silicon Nitride Ceramics 期刊论文 Xiaolan Xiao;Jiayun Deng;Qiang Xiong;Qiusheng Yan;Zhengtao Wu;Huatay Lin
40 A study of methods for the magnetorheological finishing of glass panels for the inner screen of mobile phones 期刊论文 Bin Luo;Qiusheng Yan;Jisheng Pan;Jiabin Lu;Zhiqing Hong
41 医用钛合金动态磁场集群磁流变抛光加工研究 期刊论文 阎秋生;赵言;梁智镔;陈家学;潘继生
42 一种金刚石晶片复合抛光加工方法及装置 专利 路家斌;王新汉;熊强;邓家云;阎秋生;刘文涛
43 一种超声电化学复合的晶片清洗装置 专利 高雅欣;潘继生;阎秋生
44 一种金刚石晶片抛光的材料去除率计算方法及系统 专利 路家斌;王新汉;熊强;阎秋生;刘文涛;骆应荣
45 一种凸轮驱动磁体式磁流变流体动压抛光装置及抛光方法 专利 路家斌;梁华卓;汤彪
46 用于磁流变抛光的四氧化三铁复合颗粒的制备方法及装置 专利 潘继生;沈卓珊;阎秋生
47 永磁式集群磁流变抛光机构及抛光方法 专利 潘继生;黄开泽;阎秋生;陈海阳
48 Rheological characterisation of abrasive media and finishing behaviours in abrasive flow machining 期刊论文 Youzhi Fu;Hang Gao;Qiusheng Yan;Xuanping Wang;Xu Wang
49 Preparation and polishing properties of water-based magnetorheological chemical finishing fluid with high catalytic activity for single-crystal SiC 期刊论文 Jiayun Deng;Jiabin Lu;Qiusheng Yan;Qixiang Zhang;Jisheng Pan
50 Effects of Ion Beam Etching on the Nanoscale Damage Precursor Evolution of Fused Silica 期刊论文 Yaoyu Zhong;Yifan Dai;Feng Shi;Ci Song;Ye Tian;Zhifan Lin;Wanli Zhang;Yongxiang Shen
51 Machining method for controlling the behaviours of Bingham fluids in cluster magnetorheological polishing pads 期刊论文 Bin Luo;Qiusheng Yan;Zhanliang Huang;Jisheng Pan;Youzhi Fu
52 Uniformity of cluster magnetorheological finishing with dynamic magnetic fields formed by multi-magnetic rotating poles based on the cluster principle 期刊论文 Luo Bin;Yan Qiusheng;Pan Jisheng;Guo Mingliang
53 Enhancement of the Load Capacity of High-Energy Laser Monocrystalline Silicon Reflector Based on the Selection of Surface Lattice Defects 期刊论文 Gang Zhou;Ye Tian;Shuai Xue;Guangqi Zhou;Ci Song;Lin Zhou;Guipeng Tie;Feng Shi;Yongxiang Shen;Zhe Zhu
54 紫外光催化辅助SiC抛光过程中化学反应速率的影响 期刊论文 路家斌;熊强;阎秋生;王鑫;廖博涛
55 The mechanism of Fenton reaction of hydrogen peroxide with single crystal 6H-SiC substrate 期刊论文 Jiayun Deng;Jisheng Pan;Qixiang Zhang;Qiusheng Yan;Jiabin Lu
56 Tribological behavior of 6H–SiC wafers in different chemical mechanical polishing slurries 期刊论文 Qixiang Zhang;Jisheng Pan;Xiaowei Zhang;Jiabin Lu;Qiusheng Yan
57 Synergistic Effect of Photocatalysis and Fenton on Improving the Removal Rate of 4H-SiC during CMP 期刊论文 Jiabin Lu;Yuanfu Huang;Youzhi Fu;Qiusheng Yan;Shuai Zeng
58 Optimization study on magnetorheological fluid components and process parameters of cluster magnetorheological finishing with dynamic magnetic field for sapphire substrates 期刊论文 Jisheng Pan;Kun Zheng;Qiusheng Yan;Qixiang Zhang;Jiabin Lu
59 Processing performance of vitrified bonded fixed‑abrasive lapping plates for sapphire wafers 期刊论文 Qiang Xiong;Xiaowei Nie;Jiabin Lu;Qiusheng Yan;Jiayun Deng
60 The polishing properties of magnetorheological-elastomer polishing pad based on the heterogeneous Fenton reaction of single-crystal SiC 期刊论文 Da Hu;Jiabin Lu;Jiayun Deng;Qiusheng Yan;Haotian Long;Yingrong Luo
61 一种半封闭扩展式磁流变抛光设备 专利 石峰;张万里;戴一帆;彭小强;田野;铁贵鹏
62 一种电芬顿集群磁流变复合研磨抛光装置和抛光方法 专利 潘继生;张棋翔;邓家云;阎秋生
63 一种全封闭扩展式磁流变抛光设备 专利 石峰;张万里;戴一帆;宋辞;田野;铁贵鹏
64 一种磁场动态叠加的磁流变抛光装置 专利 梁智镔;阎秋生;潘继生
65 一种磁流变弹性体及其制备方法和应用 专利 路家斌;胡达;熊强;阎秋生;杜灿林
66 一种电芬顿集群磁流变复合研磨抛光装置和方法 专利 张棋翔;潘继生;邓家云;阎秋生
67 一种研磨抛光用复合粒子的制作装置及制作方法 专利 潘继生;张棋翔;阎秋生;陈志君
68 一种动态磁场磁流变抛光装置 专利 蔡志航;潘继生;阎秋生;罗斌
69 一种用于磁流变抛光的加工装置 专利 潘继生;阎秋生;蔡志航;洪志清;陈海阳;梁智镔
70 Layer-by-Layer Repair of Small-Scale Damage of Fused Silica Based on the Magnetorheological Method 期刊论文 Mingjie Deng;Ci Song;Feng Shi;Wanli Zhang;Ye Tian;Guipeng Tie
71 广东省专利金奖《磁流变柔性抛光垫的动态磁场自锐抛光装置及其抛光方法》 奖励 潘继生;阎秋生;高伟强;于鹏
72 Research on ion beam figuring method based on new controllable ion source 会议论文 Guangqi Zhou;Ye Tian;Feng Shi;Gang Zhou;Yongbin Wang;Yongxiang Shen;Zhe Zeng
73 Optimisation of Lapping Process Parameters for Single-Crystal 4H–SiC Using Orthogonal Experiments and Grey Relational Analysis 期刊论文 Jiayun Deng;Qiusheng Yan;Jiabin Lu;Qiang Xiong;Jisheng Pan
74 Study on the Absorption Characteristics and Laser Damage Properties of Fused Silica Optics under Flexible Polishing and Shallow DCE Process 期刊论文 Wanli Zhang;Feng Shi;Ci Song;Ye Tian;Yongxiang Shen
75 Fault diagnosis method for disc slitting machine based on wavelet packet transform and support vector machine 期刊论文 Zhu Yiwei;Yan Qiusheng;Lu Jiabin
76 单晶SiC化学机械抛光基础研究——电芬顿反应条件优化及6H-SiC氧化效果分析 期刊论文 邓家云;潘继生;阎秋生
77 Study on the rheological properties and polishing properties of SiO2@CI composite particle for sapphire wafer 期刊论文 Jisheng Pan;Zhijun Chen;Qiusheng Yan
78 Study on the rheological and polishing properties of electromagnetic two-phase composite particles with abrasive characteristics 期刊论文 Zhijun Chen;Jisheng Pan;Qiusheng Yan;Zhanliang Huang;Fenglin Zhang;Shumei Chen
79 磁流变变间隙动压平坦化加工力特性研究 期刊论文 阎秋生;蔡志航;潘继生
80 Effects of the substitution of Si by P on crystallization behavior, soft magnetic properties and bending ductility of FeSiBCuPC alloys 期刊论文 Jia Xu;Yuanzheng Yang;Qiusheng Yan;Fangtao Hou;Chenfeng Fan;Guotai Wang;Ting Luo
81 Friction and wear mechanisms for single crystal GaN based on an electro-Fenton enhanced chemical reaction 期刊论文 Jisheng Pan;Zhijia Zhuo;Qixiang Zhang;Qiongbin Zheng;Qiusheng Yan
82 Investigation of Grinding and Lapping Surface Damage Evolution of Fused Silica by Inductively Coupled Plasma Etching 期刊论文 Zuocai Dai;Shanyong Chen;Xuhui Xie;Lin Zhou
83 磁流变动压复合抛光基本原理及力学特性 期刊论文 付有志;路家斌;阎秋生;谢殿华
84 Enhancement mechanism of chemical mechanical polishing for single-crystal 6H-SiC based on Electro-Fenton reaction 期刊论文 Jiayun Deng;Jiabin Lu;Qiusheng Yan;Jisheng Pan
85 熔融石英玻璃衬底的平面研磨加工实验研究 期刊论文 阎秋生;李基松;潘继生
86 A study of the magneto-controlled mechanical properties and polishing performance for single-crystal SiC used as a magnetorheological-elastomer polishing pad 期刊论文 Da Hu;Jiayun Deng;Jiabin Lu;Qiusheng Yan;Canlin Du;Jiyang Cao
87 一种用于磁流变抛光的加工装置 专利 张棋翔;潘继生;阎秋生
88 一种抛光液、磷化铟抛光装置及方法 专利 路家斌;骆应荣;熊强;阎秋生;王新汉;刘文涛
89 一种电磁流变抛光用复合粒子的制备装置 专利 周锐;张棋翔;潘继生;阎秋生
90 一种可消磁磁场发生装置 专利 蔡志航;潘继生;阎秋生;陈海阳
91 一种抛光用复合颗粒的制备装置及制备方法 专利 潘继生;陈志君;阎秋生;张棋翔
92 一种固相反应的液体弹珠式半导体晶片研磨块及其制备方法和应用 专利 路家斌;雒梓源;熊强;阎秋生;夏江南;陈缘靓
93 Laser energy absorption prediction of silicon substrate surface from a mid- and high-spatial frequency error 期刊论文 Tian Ye;Zhou Gang;Xue Shuai;Shi Feng;Song Ci;Li Furen;Zhong Yaoyu;Shen Yongxiang
94 Basic exploration and research on magnetoelectric synergistic rheological finishing 期刊论文 Zhanliang Huang;Jisheng Pan;Bin Luo;Qiusheng Yan;Zhijun Chen
95 Equipment for in situ measurement of machining defects of large aperture optical elements 期刊论文 Guipeng Tie;Haifeng Zhou;Feng Shi;Jian Chen;Shuo Qiao;Ye Tian;Ci Song
96 Low-Energy Pulsed Ion Beam Technology with Ultra-High Material Removal Resolution and Widely Adjustable Removal Efficiency 期刊论文 Guangqi Zhou;Ye Tian;Feng Shi;Ci Song;Guipeng Tie;Gang Zhou;Lingbo Xie;Jianda Shao;Zhouling Wu
97 Effects of axial ultrasonic vibration on grinding quality in peripheral grinding and end grinding of ULE 期刊论文 Guoyan Sun;Feng Shi;Zhen Ma
98 An Exploration into Damage Repair and Manufacturing Technology of Photomask Glass Substrates 期刊论文 Bo Wang;Feng Shi;Guipeng Tie;Ci Song;Shuangpeng Guo
99 2020年粤港澳大湾区高价值专利布局大赛“最具投资潜力奖” 奖励 潘继生;阎秋生;张棋翔;陈志君;路家斌;高伟强
100 Study on Damage Characteristics of Fused Silica under Ion Beam Sputtering and AMP Technique 期刊论文 Wanli Zhang;Feng Shi;Ci Song;Ye Tian;Shuangpeng Guo
101 磁流变变间隙动压平坦化加工的工艺及机理 期刊论文 阎秋生;蔡志航;潘继生;黄蓓;曾自勤
102 蓝宝石晶片飞秒激光辅助集群磁流变抛光试验研究 期刊论文 赖科铭;阎秋生;谢小柱;彭清发;赵朋
103 Basic research on chemical mechanical polishing of single-crystal SiC-Electro-Fenton: Reaction mechanism and modelling of hydroxyl radical generation using condition response modelling 期刊论文 Jiayun Deng;Jiabin Lu;Qiusheng Yan;Jisheng Pan
104 Polishing of Silicon Nitride Ceramic Balls by Clustered Magnetorheological Finish 期刊论文 Xiaolan Xiao;Guangxian Li;Haijuan Mei;Qiusheng Yan;Huatay Lin;Fenglin Zhang
105 Prediction of the surface roughness and material removal rate in chemical mechanical polishing of single-crystal SiC via a back-propagation neural network 期刊论文 Jiayun Deng;Qixiang Zhang;Jiabin Lu;Qiusheng Yan;Jisheng Pan;Run Chen
106 Detailed near-surface nanoscale damage precursor measurement and characterization of fused silica optics assisted by ion beam etching 期刊论文 Yaoyu Zhong;Feng Shi;Ye Tian;Yifan Dai;Ci Song;Wanli Zhang;Zhifan Lin
107 一种曲率自适应集群磁流变抛光自由曲面的方法及装置 专利 潘继生;阎秋生;柏显亭;郑琼彬;苏曼丹
108 一种电磁耦合抛光设备及其电磁耦合控制磨粒状态的抛光方法 专利 黄展亮;潘继生;阎秋生;罗斌
109 一种研磨抛光用复合粒子的制作装置及制作方法 专利 潘继生;张棋翔;阎秋生;陈志君
110 一种集群磁流变超声波复合抛光加工装置及方法 专利 阎秋生;赖科铭;路家斌;潘继生
111 一种增压雾化喷淋装置及其抛光装置 专利 罗斌;邓家云;潘继生;阎秋生
112 电磁耦合装置及具有其的抛光装置、电磁流变性能测量装置 专利 阎秋生;黄展亮;潘继生
113 一种曲率自适应集群磁流变抛光自由曲面的方法及装置 专利 潘继生;阎秋生;柏显亭;郑琼彬;蔡曼丹
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