超低介电常数纳米多孔薄膜材料的制备和特性研究

50272027
2002
E0207.无机非金属半导体与信息功能材料
王印月
面上项目
教授
兰州大学
20万元
多孔薄膜.;超低介电常数.;纳米材料
2003-01-01到2005-12-31
  • 中英文摘要
  • 结题摘要
  • 结题报告
  • 项目成果
  • 项目参与人
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序号 标题 类型 作者
1 Electrical Properties of Nanoporous F Doped SiO2 Low-k Thin Films Prepared by Sol-Gel Method with catalyst HF 专著 Zhi-Wei He|Xue-Qin Liu|Yong-Ping Guo|Yin-Yue Wang|
2 Preparation of transparent conductive ZnO:Tb films and their PL properties 专著 Fang zebo|Tan yongsheng Liu xueqin|Yang yinghu|Wang yinyue|
3 单晶结构解析过程中结构无序问题的产生及其处理方法的研究 专著 李一志|王流芳|何凤英|王印月|
4 Structural characteristic and thermal stability of nanoporous SiO2 films prepared by sol-gel method with catalyst HF 专著 Z.W. He|X.Q. Liu|Y.Y. Wang|
5 Improvement of electrical properties of low dielectric constant nanoporous silica films prepared using sol-gel method with catalyst HF 专著 Z.W.He|X.Q.Liu|Q.Su|Y.Y Wang|
6 多孔硅衬底上溅射沉积SiC:Tb薄膜得光致发光行为 专著 徐大印|刘彦平|何志巍|方泽波|刘雪芹|王印月|
7 Structural and optical properties of Ti1-xCoxO2 films prepared by sol-gel spin coating 专著 Ch.M. Huang|Y.P. Guo|X.Q. Liu Y.Y. Wang|
8 Effect of Annealing on the Properties of Low-k Nanoporous SiO2 Films Prepared by Sol-Gel Method with Catalyst HF 专著 Z.W. He|X.Q. Liu|D.Y. Xu|Y.Y. Wang|
9 Fabrication of quasi-one dimension silicon carbide nanorods prepared by RF sputtering 专著 Dayin Xu|Zhiwei He|Yongping Guo|Yinyue Wang|
10 Influence of post-annealing treatment on the structure properties of ZnO films 专著 Z.B Fang|Z.J.Yan|Y.S.Tan|X.Q. Liu|Y.Y Wang|
11 Microstructural characterization of low dielectric silica xerogel film 专著 Z.W.He|C.M.Zhen|X.Q.Liu|W.lan|Y.Y Wang|
12 Structural and optical properties of ZnO films grown on the AAO templates 专著 Zebo Fang|Yinyue Wang|Xinping Peng|Xueqin Liu|Congmian zhen|
13 Synthesis, characterization and antibacterial activities of ⅡB group metal complexes with soluble vitamin K3-thiosemicarbazone 专著 Tang Hui-an|Zuo Guo-fang|Wang Liu-fang|Wang Yinyue|
14 桑色素及其配合物与DNA作用的比较 专著 王流芳|宋玉民|马迎非|张歧|王印月|
15 分子模板法制备纳米多孔SiO2薄膜 专著 何志巍|甄聪绵|缑洁|兰伟|郭得峰|王印月|
16 Blue luminescent center in ZnO films deposited on silica substrates 专著 Z.B. Fang|Y.Y Wang|D.Y. Xu|Y.S. Tan|X.Q. Liu|
17 Y(RA)3.4H2O的合成及其抗白血病HL-60细胞的研究 专著 李勤喜|宋玉民|王流芳|王印月|
18 Y 掺杂Al2O3高k栅介质薄膜的制备及性能研究 专著 郭得峰|耿为刚|兰伟|黄春明|王印月|
19 Synthesis, Characterization, and Antioxidative Activity of Ternary Rare-Earth Complexes of 5-Fluorouracil-acetic Acid and 2, 2`-Bipyridine 专著 J.Huang|J.Q.Qu|L.F.Wang|Y.Q.Liu|Y.Y.Wang|Y.M.Song|C.J.Zhang|R.Zhan|
20 溶胶-凝胶法制备纳米多孔SiO2薄膜 专著 何志巍|甄聪绵|兰伟|郭得峰|王印月|
21 Characteristic of nanoporous SiO2 thin film prepared by sol-gel method with catalyst HF 专著 Z.W.He|X.Q.Liu|D.Y.Xu|Q.Su|D.F.Guo|Y.Y Wang|
22 Transparent conductive ZnO:Tb films prepared by RF Sputtering 专著 Z.B. Fang|Y.S. Tan|Y.Y. Wang|
23 Structural characteristic of ultra-low k SiO2 thin films prepared by molecular template 专著 Zhi-Wei He|Xue-Qin Liu|Da-Yin Xu|Jie Gou|Yin-Yue Wang|
24 Low dielectric constant nanoporous SiO2 films formed by twice modification processing 专著 C.M.Zhen|Z.Q.Zhao|Z.W.He X.F.Nie|Y.Y Wang|
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