与超极紫外光刻光源(6.x nm)相关的原子和辐射过程
11404152
2014
A2107.原子分子物理与其它学科交叉
李博文
青年科学基金项目
副教授
兰州大学
25万元
激光等离子体;超极紫外光刻光源;辐射光谱
2015-01-01到2017-12-31
- 中英文摘要
- 结题摘要
- 结题报告
- 项目成果
- 项目参与人
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| 序号 | 标题 | 类型 | 作者 |
|---|---|---|---|
| 1 | 一种双脉冲碰撞等离子体极紫外光刻光源产生装置 | 专利 | 李博文;陈熙萌 |
| 2 | Lattice-constant and electron-affinity effects on negative-ion conversion in atom-ionic-crystal-surface grazing scattering | 期刊论文 | Zhou Wang;Zhou Hu;Zhang Meixiao;Zhou Lihua;Li Yuan;Li Bowen;Chen Ximeng |
| 3 | Dielectronic recombination of tungsten ions | 期刊论文 | Li Bowen;O'Sullivan Gerry;Dong Chenzhong;Chen Ximeng |
| 4 | Complete-velocity-range description of negative-ion conversion of neutral atoms on an alkali-metal-halide surface under grazing geometry | 期刊论文 | Zhou Hu;Zhou Wang;Zhang Meixiao;Zhou Lihua;Ma Yulong;Wang Guangyi;Wu Yong;Li Bowen;Chen Ximeng |
| 5 | Characteristics of laser produced plasmas of hafnium and tantalum in the 1-7 nm region | 期刊论文 | Li Bowen;Otsuka Takamitsu;Sokell Emma;Dunne Padraig;O'Sullivan Gerry;Hara Hiroyuki;Arai Goki;Tamura Toshiki;Ono Yuichi;Thanh-Hung Dinh;Higashiguchi Takeshi |
| 6 | 一种双脉冲碰撞等离子体极紫外光刻光源产生装置 | 专利 | 李博文;陈熙萌 |
| 7 | XUV spectral analysis of ns- and ps-laser produced platinum plasmas | 期刊论文 | Wu Tao;Higashiguchi Takeshi;Li Bowen;Suzuki Yuhei;Arai Goki;Thanh-Hung Dinh;Dunne Padraig;O'Reilly Fergal;Sokell Emma;O'Sullivan Gerry |
| 8 | Analysis of unresolved transition arrays in XUV spectral region from highly charged lead ions produced by subnanosecond laser pulse | 期刊论文 | Wu Tao;Higashiguchi Takeshi;Li Bowen;Arai Goki;Hara Hiroyuki;Kondo Yoshiki;Miyazaki Takanori;Dinh Thanh-Hung;O'Reilly Fergal;Sokell Emma;O'Sullivan Gerry |
| 9 | Properties of the extreme ultraviolet emission from germanium and gallium plasmas | 期刊论文 | Li Bowen;Hara Hiroyuki;Suzuki Yuhei;Arai Goki;Higashiguchi Takeshi;Ohashi Hayato;Jiang Weihua;Makimura Tetsuya;Sakaue Hiroyuki A.;Suzuki Chihiro;Kato Daiji;Murakami Izumi;Dunne Padraig;Long Elaine;Sheridan Paul;Chen Ximeng;O'Sullivan Gerry |
| 10 | Characteristics of x-ray emission from optically thin high-Z plasmas in the soft x-ray region | 期刊论文 | Ohashi Hayato;Higashiguchi Takeshi;Suzuki Yuhei;Arai Goki;Li Bowen;Dunne Padraig;O'Sullivan Gerry;Sakaue Hiroyuki A.;Kato Daiji;Murakami Izumi;Tamura Naoki;Sudo Shigeru;Koike Fumihiro;Suzuki Chihiro |
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