【51135005】复杂曲面微结构的投影式激光振镜扫描刻蚀新原理、新方法国家自然基金项目

复杂曲面微结构的投影式激光振镜扫描刻蚀新原理、新方法

项目批准号： 51135005

批准年份： 2011

学科分类： E0509.加工制造

项目负责人：曾晓雁

资助类别：重点项目

负责人职称：教授

依托单位：华中科技大学

资助金额： 290万元

关键词：振镜;投影式;激光刻蚀;复杂曲面;微结构

起止时间： 2012-01-01到2016-12-31

中英文摘要
结题摘要
结题报告
项目成果
项目参与人

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序号	标题	类型	作者
1	一种耐高温紫外正型光刻胶及光刻工艺	期刊论文	艾骏\|曾晓雁\|刘建国\|
2	Design and Fabrication of Micro-variable Radiator	期刊论文	Xuekang Chen\|Xiyuan Wang\|Chuang Han\|Jianping Yang\|
3	1064nm和355nm纳秒激光扫描刻蚀覆铜板工艺及质量研究	期刊论文	张菲\|蒋明\|段军\|曾晓雁\|
4	Laser ablation the combination of metal film/organics material	期刊论文	Ni Ren\|Gan Wu\|Jianping Yang\|Shengzhu Cao\|
5	High-adhesion Cu patterns fabricated by nanosecond laser modification and electroless copper plating	期刊论文	Jianguo Liu\|Xiaoyan Zeng\|Qifeng Du\|Jun Ai\|
6	Long-rang ordered straight holes manufacturing in polyimide for proton exchange membrane fuel cells	期刊论文	Fei Zhang\|Jun Duan\|Haolin Tang\|Xiaoyan Zeng\|
7	一种248nm光刻胶成膜树脂的合成及相关性研究	期刊论文	刘建国\|蒋明\|曾晓雁\|
8	Study on laser ablation the combination of metal film/organics material	会议论文	Ni Ren\|Gan Wu\|Jianping Wang\|Shengzhu Cao\|
9	水辅助激光刻蚀氧化铝陶瓷的研究	期刊论文	张菲\|段军\|罗瑞峰\|曾晓雁\|
10	聚酰亚胺基底金属薄膜激光刻蚀温度场分布	期刊论文	汤富领\|闫晓东\|路文江\|刘孝丽\|
11	激光刻蚀聚酰亚胺基底铝薄膜的温度场模拟	期刊论文	杨建平\|王瑞\|吴敢\|任妮\|
12	Ultraviolet laser ablation of fluorine-doped tin oxide thin films for dye-sensitized back-contact solar cells	期刊论文	Jun Duan\|Fei Zhang\|Xiaoyan Zeng\|Udo Bach\|
13	Electronically conductive silver paste obtained by use of silver neodecanoate as precursor	期刊论文	Longguang Shen\|Jianguo Liu\|Xiaoyan Zeng\|Zhao Ren\|
14	Multi-objective optimization of Laser Ablation by Projective Galvanometer Scanning	会议论文	Fei Zhang\|Baoye Wu\|Shanhao Ke\|Xiaoyan Zeng\|
15	Surface modification of bisphenol A polycarbonate using an ultraviolet laser with high-speed, direct-writing technology	期刊论文	Jianguo Liu\|Suhuan Wang\|Ming Lv\|Xiaoyan Zeng\|
16	石英陶瓷激光刻蚀加工技术研究	期刊论文	孔令瑞\|张菲\|段军\|曾晓雁\|
17	A study on dual laser beam separation technology of KDP crystal	期刊论文	Jun Duan\|Xiaoyan Zeng\|Huan Yang\|Shan Huang\|
18	Surface modification of bisphenol A polycarbonate material by ultraviolet Nd:YVO4 laser high-speed microprocessing technology	期刊论文	Jianguo Liu\|Suhuan Wang\|Ming Lv\|Xiaoyan Zeng\|
19	High repetition rate picosecond laser ablation of Cr12MoV cold work mold steel	会议论文	Fei Zhang\|Jun Duan\|Xizhao Wang\|Xiaoyan Zeng\|
20	A low-cost, high-efficiency and high-flexibility surface modification technology for a black bisphenol A polycarbonate board	期刊论文	Suhuan Wang\|Jianguo Liu\|Ming Lv\|Xiaoyan Zeng\|
21	Study on laser etching mechanism of aluminum thin film on ploymide	期刊论文	Ni Ren\|Jianping Yang\|Rui Wang\|GanWu\|
22	大面积三维激光刻蚀技术研究	会议论文	杨建平\|王瑞\|曹生珠\|陈学康\|
23	一种机床多运动轴平行度的检测装置	专利	*蒋明; 王曦照; 曾晓雁; 段军
24	移动脉冲激光刻蚀聚酰亚胺基底金属薄膜研究	期刊论文	张宏伟\|杨建平\|任妮\|刘孝丽\|
25	脉冲紫外激光改性对聚碳酸酯表面润湿性能的影响	期刊论文	王素焕\|刘建国\|吕铭\|曾晓雁\|
26	Synthesis, structure and spectroscopic properties of a novel compound bis(benzylamino)silver(I) benzylcarbamate	期刊论文	Jianguo Liu\|Xiaoyan Zeng\|Hua Li\|
27	飞秒与纳秒激光刻蚀单晶硅对比研究	期刊论文	杨焕\|黄珊\|段军\|杜敏\|
28	用于金属薄膜刻蚀的激光束能量分布整形研究	期刊论文	杨建平\|陈学康\|吴敢\|王瑞\|
29	一种机床多运动轴平行度的检测装置和方法	专利	*蒋明; 王曦照; 曾晓雁; 段军
30	Micro-variable emittance devices based on UV laser micromachining	期刊论文	Xiyuan Wang\|Chuang Han\|Jianping Yang\|Xuekang Chen\|
31	Electrical Conductivity of thick films made from silver methylcarbamate paste	期刊论文	Jianguo Liu\|Ming Jiang\|Xiaoyan Zeng\|
32	Laser etching of aluminum thin film on polyimide: Simulation and experimental studies	期刊论文	Rui Wang\|Jianping Yang\|GanWu\|Ni Ren\|
33	一种多功能激光加工头	专利	段军; 李祥友; 胡乾午; 曾晓雁
34	Micro-variable radiator based on UV laser micromachining	会议论文	Xiyuan Wang\|Chuang Han\|Jianping Yang\|Xuekang Chen\|
35	Numerical simulation of laser focusing properties inside birefringent crystal	期刊论文	Jun Duan\|Xiaoyan Zeng\|Baoye Wu\|Xizhao Wang\|
36	Tailoring the surface wettability of polyimide by UV laser direct texturing in different gas atmospheres	期刊论文	Jianguo Liu\|Lianbo Guo\|Ming Lv\|Xiaoyan Zeng\|
37	一种激光多点聚焦加工系统	专利	段军; 邓磊敏; 曾晓雁
38	A study simulation on transmission characteristics of focused laser inside KDP crystal	会议论文	Jun Duan\|Xiaoyan Zeng\|Shan Huang\|Huan Yang\|
39	Ultraviolet pulsed excimer laser polishing of chemical vapor deposited polycrystalline diamond film	期刊论文	Shengzhu Cao\|Yuqing Xiong\|Jinxiao Wang\|Dongcai Zhao\|
40	一种多功能激光加工头	专利	段军; 李祥友; 胡乾午; 曾晓雁
41	Research on large area 3D laser ablation technique	会议论文	Jianping Yang\|Rui Wang\|Shengzhu Cao\|Xuekang Chen\|
42	Parametric effects on picosecond laser drill of Al2O3 ceramics assisted by water	会议论文	Tian Li\|Jun Duan\|Baoye Wu\|Xiaoyan Zeng\|
43	On the Mechanism of Nanosecond Laser Etching of a Metal Film Deposited on a Composite Material	期刊论文	Gan Wu\|Rui Wang\|Lanxi Wang\|KaiWen Shang\|

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