用于纳米光刻的等离子体发射与吸收光谱

10774191
2007
A2107.原子分子物理与其它学科交叉
曾交龙
面上项目
教授
中国人民解放军国防科技大学
32万元
EUV光源;发射与吸收光谱;细致能级模型;纳米光刻
2008-01-01到2010-12-31
  • 中英文摘要
  • 结题摘要
  • 结题报告
  • 项目成果
  • 项目参与人
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序号 标题 类型 作者
1 类锂离子KLL双电子复合过程研究 期刊论文
2 Plasma screening effects on the atomic structure and radiative opacity of dense carbon plasmas based on the DLA model 期刊论文
3 慢电子与碱金属、碱土金属原子碰撞过程的共振结构和负离子特性 奖励
4 Extreme-ultraviolet emissivity from Xe8+ to Xe12+ by using a detailed line-by-line method 期刊论文
5 Spectrally resolved and Rosseland and Planck mean opacities of iron plasmas at high temperatures above 100 eV: A systematic study 期刊论文
6 Modeling of the population kinetics of NLTE plasmas based on an approximation of nonrelativistic configuration 期刊论文
7 Validity of analytical formulas for autoionization and dielectronic capture rates used in collisional-radiative models 期刊论文
8 Debye屏蔽对碳等离子体电荷态丰度分布的影响 期刊论文
9 Electron impact collision strengths and transition rates for extreme ultraviolet emission from Xe10+ 期刊论文
10 Electron correlation effects on transition probabilties from 4d8-4d75p of Xe10+ 期刊论文
11 Detailed diagnostics of a laser produced aluminum plasma by the Ka satellites 期刊论文
12 Detailed investigations on radiative opacity and emissivity of tin plasmas in extreme-ultraviolet region 期刊论文
13 Detailed level accounting investigation on the radiative opacity of gold plasmas at high temperatures 期刊论文
14 Plasma screening effects on the atomic structure and radiative opacity of dense carbon plasmas based on the DLA model 期刊论文
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