高一致性平面二维纳米光栅干涉光刻加工关键技术研究

61905129
2019
F0508.应用光学
李星辉
青年科学基金项目
副教授
清华大学
25万元
干涉检测;光学元件;光学加工;表面质量;超高精度
2020-01-01到2022-12-31
  • 中英文摘要
  • 结题摘要
  • 结题报告
  • 项目成果
  • 项目参与人
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序号 标题 类型 作者
1 一种高分辨率的套刻误差测量方法及装置 专利 李星辉;单硕楠;李一鸣;邓富元;王晓浩
2 Laser triangulation measurement system with Scheimpflug calibration based on the Monte Carlo optimization strategy 期刊论文 Chen Ruiming;Li Yiming;Xue Gaopeng;Tao Yihao;Li Xinghui
3 A new method to measure spectral reflectance and film thickness using a modified chromatic confocal senso 期刊论文 Bai Jiao;Li Jingwen;Wang Xiaohao;Zhou Qian;Ni Kai;Li Xinghui
4 Three-Probe Error Separation with Chromatic Confocal Sensors for Roundness Measurement 期刊论文 Bai Jiao;Wang Yingzuo;Wang Xiaohao;Zhou Qian;Ni Kai;Li Xinghui
5 A Reflective-Type Heterodyne Grating Interferometer for Three-Degree-of-Freedom Subnanometer Measurement 期刊论文 Junhao Zhu;Guochao Wang;Shengtong Wang;Xinghui Li
6 Method and system for phase measurement of the heterodyne interference system 会议论文 Yang Yi;Wang Guochao;Zhu Junhao;Wang Shengtong;Wu Yonggui;Li Xinghui
7 A research on compact short-distance grating interferometer based on ridge prism 会议论文 Liao Baiqi;Wang Shengtong;Lin Jianjiu;Dou Yi;Wang Xiaohao;Li Xinghui
8 FPGA displacement calculation platform and test of two-phase grating interference encoder 会议论文 Shi Ningning;Zhu Junhao;Wang Shengtong;Han Yaodong;Yu Kangning;Wang Xiaohao;Li Xinghui
9 传感器、传感器标定方法与设备、存储介质 专利 李星辉;陈瑞铭;王晓浩;周倩;倪凯
10 一种绝对式六自由度光栅编码器 专利 李星辉;汪盛通
11 A real-Time processing system for dual-channel six-degree-of-freedom grating ruler based on FPGA 会议论文 Shi Ningning;Wang Shengtong;Xue Gaopeng;Liu Mengfang;Han Yaodong;Zhu Junhao;Wang Xiaohao;Ni Kai;Li Xinghui
12 Two-channel six degrees of freedom grating-encoder for precision-positioning of sub-components in synthetic-aperture optics 期刊论文 Kangning Yu;Junhao Zhu;Weihan Yuan;Qian Zhou;Gaopeng Xue;Guanhao Wu;Xiaohao Wang;Xingui Li
13 Polarized holographic lithography system for high-uniformity microscale patterning with periodic tunability 期刊论文 Gaopeng Xue;Qihang Zhai;Haiou Lu;Qian Zhou;Kai Ni;Liyu Lin;Xiaohao Wang;Xinghui Li
14 Heterodyne Three-Degree-of-Freedom Grating Interferometer for Ultra-precision Positioning of Lithography Machine 会议论文 Zhu Junhao;Wang Guochao;Xue Gaopeng;Zhou Qian;Li Xinghui
15 光刻套刻误差测试技术 期刊论文 李一鸣;杨霖;王晓浩;单硕楠;邓富元;贺志学;刘政通;李星辉
16 Planar diffractive grating for magneto-optical trap application: Fabrication and testing 期刊论文 Wang Guochao;Xue Gaopeng;Zhai Qihang;Zhu Junhao;Yu Kangning;Huang Guangyao;Wang Min;Zhong Aihua;Zhu Liangxiao;Yan Shuhua;Li Xinghui
17 Patterning nanoscale crossed grating with high uniformity by using two-axis Lloyd's mirrors based interference lithography 期刊论文 Xue Gaopeng;Lu Haiou;Li Xinghui;Zhou Qian;Wu Guanhao;Wang Xiaohao;Zhai Qihang;Ni Kai
18 An FPGA Platform for Next-Generation Grating Encoders 期刊论文 Yaodong Han;Kai Ni;Xinghui Li;Guanhao Wu;Kangning Yu;Qian Zhou;Xiaohao Wang
19 Modulation of dielectric film on two-axis Lloyd's mirrors for patterning high-uniformity nanoscale grating 会议论文 Xue Gaopeng;Lin Liyu;Zhai Qihang;Zhou Qian;Wang Xiaohao;Li Xinghui
20 一种微偏振片阵列制作方法、掩膜板、基板及载物台 专利 李星辉;邓富元;陆天石
21 检测系统、检测方法及光栅尺 专利 李星辉;余康宁;周倩;吴冠豪;倪凯;王晓浩
22 Self-reference dispersion correction for chromatic confocal displacement measurement 期刊论文 Bai Jiao;Li Xinghui;Wang Xiaohao;Wang Jianjian;Ni Kai;Zhou Qian
23 面向光刻机晶圆台的超精密光栅定位技术 期刊论文 朱俊豪;汪盛通;李星辉
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