金属栅极功函数调控及其与高介电HfO2栅介质界面相互作用研究

60806032
2008
F0406.集成电路器件、制造与封装
谭瑞琴
青年科学基金项目
研究员
宁波大学
24万元
金属栅极;功函数调控;界面相互作用;HfO2薄膜
2009-01-01到2011-12-31
  • 中英文摘要
  • 结题摘要
  • 结题报告
  • 项目成果
  • 项目参与人
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序号 标题 类型 作者
1 Two-Step Sintering of Pristine and Aluminum-Doped Zinc Oxide Ceramics 期刊论文 Yulong Zhang|Ping Cui|Ruiqin Tan|Ye Yang|Weiyan Wang|Xianpeng Zhang|Weijie Song|
2 Dependence of aluminum-doped zinc oxide work function on surface cleaning method as studied by ultraviolet and X-ray photoelectron spectroscopies 期刊论文 Weiyan Wang|Kemin Jiang|Xianpeng Zhang|Quanyu Feng|Weijie Song|Ruiqin Tan|Jinhua Huang|
3 Shape-controlled growth and single-crystal XRD study of submillimeter-sized single crystals of SnO 期刊论文 Weijie Song|Yanqun Guo| Z. L. Luo|Xing Li|C. Gao|Ruiqin Tan|
4 Thermal Stability of Aluminum Doped Zinc Oxide Thin Films 期刊论文 Yulong Zhang|Jia Li|Ruiqin Tan|Jinhua Huang|Ye Yang|Weijie Song|
5 Synthesis,characterization and gas-sensing properties of Pd-doped SnO_2 nano particles 期刊论文 Ruiqin Tan|Tiefeng Xu|Yanqun Guo|Junhua Zhao|Weijie Song|Yue Li|
6 Effect of Rapid Annealing Condition on the Structure and Conductivity Properties of Polycrystalline Silicon Films on Glass 期刊论文 Weijie Song|Jinhua Huang|Weiyan Wang|Xianpeng Zhang|Ruiqin Tan|
7 Effect of deposition condition and UV-ozone post-treatment on work function of DC magnetron sputtered AZO thin film 期刊论文 Quanyu Feng|Yulong Zhang|Ruiqin Tan|Weiyan Wang|Jinhua Huang|Weijie Song|Kemin Jiang|
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