脉冲激光诱导金属与锗反应接触界面微结构改性及杂质输运机理研究
61904155
2019
F0406.集成电路器件、制造与封装
王尘
青年科学基金项目
副教授
厦门理工学院
23万元
超浅结源漏;金属锗化物;超低阻源漏接触;激光退火;杂质输运
2020-01-01到2022-12-31
- 中英文摘要
- 结题摘要
- 结题报告
- 项目成果
- 项目参与人
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| 序号 | 标题 | 类型 | 作者 |
|---|---|---|---|
| 1 | Phosphorus diffusion and activation in fluorine co-implanted germanium after excimer laser annealing | 期刊论文 | Chen Wang;Wei-Hang Fan;Yi-Hong Xu;Yu-Chao Zhang;Hui-Chen Fan;Cheng Li;Song-Yan Cheng |
| 2 | The effects of temperature on space charge and internal electric field distribution in CdZnTe detector | 会议论文 | Lili Liu;Rongrong Guo;Yushen Tong;Weilong Chen;Jinhai Lin;Chen Wang |
| 3 | Structural, optical and morphological evolution of Ga2O3/Al2O3 (0001) films grown at various temperatures by pulsed laser deposition | 期刊论文 | Chen Wang;Li Shi-Wei;Fan Wei-Hang;Zhang Yu-Chao;Zhang Xiao-Ying;Guo Rong-Rong;Lin Hai-Jun;Lien Shui-Yang;Zhu Wen-Zhang |
| 4 | Ion bombardment effect on properties of MoO thin film under different PEALD plasma exposure time | 期刊论文 | Chun-Hui Bao;Chen Wang;Ming-Jie Zhao;Wan-Yu Wu;Chia-Hsun Hsu;XiaoYing Zhang;Dong-Sing Wuu;Shui-Yang Lien;Wen-Zhang Zhu |
| 5 | Oxygen annealing induced crystallization and cracking of pulsed laser deposited Ga2O3 films | 期刊论文 | Chen Wang;Shi-Wei Li;Yu-Chao Zhang;Wei-Hang Fan;Hai-Jun Lin;Dong-Sing Wuu;Shui-Yang Lien;Wen-Zhang Zhu |
| 6 | A readout circuit for carbon nanotube based infrared image sensor | 会议论文 | Qi Lin;Shikai Zuo;Chen Wang;Chengying Chen |
| 7 | Influence of plasma power on deposition mechanism and structural properties of MoOx thin films by plasma enhanced atomic layer deposition | 期刊论文 | Chen Wang;Bao Chun-Hui;Wu Wan-Yu;Hsu Chia-Hsun;Zhao Ming-Jie;Lien Shui-Yang;Zhu Wen-Zhang |
| 8 | 氧气退火温度对室温脉冲激光沉积氧化镓薄膜特性的影响 | 期刊论文 | 王尘;张宇超;范伟航;李世韦;张小英;林海军;连水养;朱文章 |
| 9 | Growth and characterization of Si-doped Ga2O3 thin films by remote plasma atomic layer deposition: Toward UVC-LED application | 期刊论文 | Xiao-Ying Zhang;Yue Yang;Wei-Hang Fan;Chen Wang;Wan-Yu Wu;Ming-Chun Tseng;Dong-Sing Wuu;Peng Gao;Hao-Chung Kuo;Shui-Yang Lien;Wen-Zhang Zhu |
| 10 | Substrate temperature-controlled precursor reaction mechanism of PEALD-deposited MoOx thin films | 期刊论文 | Chen Wang;Chun-Hui Bao;Wan-Yu Wu;Chia-Hsun Hsu;Ming-Jie Zhao;Xiao-Ying Zhang;Shui-Yang Lien;Wen-Zhang Zhu |
| 11 | Effect of deep level defects on space charge distribution in CdZnTe crystals | 期刊论文 | Guo Rong-Rong;Lin Jin-Hai;Liu Li-Li;Li Shi-Wei;Wang Chen;Lin Hai-Jun |
| 12 | Annealing temperature controlled crystallization mechanism and properties of gallium oxide film in forming gas atmosphere | 期刊论文 | Chen Wang;Shi-Wei Li;Wei-Hang Fan;Yu-Chao Zhang;Hai-Jun Lin;Xiao-Ying Zhang;Shui-Yang Lien;Wen-Zhang Zhu;Dong-Sing Wuu |
| 13 | Compact Ga2O3 Thin Films Deposited by Plasma Enhanced Atomic Layer Deposition at Low Temperature | 期刊论文 | Yue Yang;Xiao-Ying Zhang;Chen Wang;Fang-Bin Ren;Run-Feng Zhu;Chia-Hsun Hsu;Wan-Yu Wu;Dong-Sing Wuu;Peng Gao;Yu-Jiao Ruan;Shui-Yang Lien;Wen-Zhang Zhu |
| 14 | 一种电容-电压转换电路 | 专利 | 陈思婷;陈铖颖;余仕湖;李伯阳;王尘;冯平;杨可;宋长坤 |
| 15 | 一种可变型多用途微型移动平台 | 专利 | 左石凯;陈铖颖;王尘;肖雪芳;林峰;蔡艺军;黄新栋 |
| 16 | Texture evolution mechanism of pulsed laser deposited in-doped Ga2O3 film affected by laser fluence and its application in solar-blind photodetector | 期刊论文 | Chen Wang;Yu-Chao Zhang;Wei-Hang Fan;Wan-Yu Wu;Dong-Sing Wuu;Shui-Yang Lien;Wen-Zhang Zhu |
| 17 | Influence of sub-bandgap illumination on space charge distribution in CdZnTe detector | 期刊论文 | Guo Rongrong;Lin Jinhai;Liu Lili;Li Shiwei;Wang Chen;Xiong Feibin;Lin Haijun |
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