高κ栅介质/III-V族半导体界面元素扩散的表征及钝化研究
61504070
2015
F0404.半导体电子器件与集成
董红
青年科学基金项目
副教授
南开大学
23万元
III-V半导体;原子层沉积;High-κ栅介质;X-射线光电子能谱;界面
2016-01-01到2018-12-31
- 中英文摘要
- 结题摘要
- 结题报告
- 项目成果
- 项目参与人
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| 序号 | 标题 | 类型 | 作者 |
|---|---|---|---|
| 1 | Thermal Stability Study of GaP/High-k Dielectrics Interfaces | 期刊论文 | Wang Xinglu;Zhao Yanfei;Huang Rong;Li Fangsen;Lu Xiaoming;Huang Zengli;Shen Yang;Wang Hu;Shao Dawei;Liu Mengyin;Tan Baimei;Zhang Jian;Xie Xinjian;An Dingsun;Dong Hong |
| 2 | Interface chemistry study of InSb/Al2O3 stacks upon in situ post deposition annealing by synchrotron radiation photoemission spectroscopy | 期刊论文 | Shi Xiaoran;Wang Xinglu;Sun Yong;Liu Chen;Wang WeiHua;Cheng Yahui;Wang Weichao;Wang Jiaou;Cho Kyeongjae;Lu Feng;Liu Hui;Dong Hong |
| 3 | Interface chemistry and surface morphology evolution study for InAs/Al2O3 stacks upon in situ ultrahigh vacuum annealing | 期刊论文 | Wang Xinglu;Qin Xiaoye;Wang Wen;Liu Yue;Shi Xiaoran;Sun Yong;Liu Chen;Zhao Jiali;Zhang Guanhua;Liu Hui;Cho Kyeongjae;Wu Rui;Wang Jiaou;Zhang Sen;Wallace Robert M.;Dong Hong |
| 4 | Schottky Barrier Height of Pd/MoS2 Contact by Large Area Photoemission Spectroscopy | 期刊论文 | Dong Hong;Gong Cheng;Addou Rafik;McDonnell Stephen;Azcatl Angelica;Qin Xiaoye;Wang Weichao;Wang Weihua;Hinkle Christopher L.;Wallace Robert M. |
| 5 | Elemental diffusion study of Ge/Al2O3 and Ge/AlN/Al2O3 interfaces upon post deposition annealing | 期刊论文 | Zhu Yunna;Wang Xinglu;Liu Chen;Wang Tao;Chen Hongyan;Wang Wei-Hua;Cheng Yahui;Wang Weichao;Wang Jiaou;Wang Shengkai;Cho Kyeongjae;Liu Hui;Lu Hongliang;Dong Hong |
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