【91023047】微/纳光学阵列元件的约束刻蚀剂层加工技术与系统的基础研究国家自然基金项目

微/纳光学阵列元件的约束刻蚀剂层加工技术与系统的基础研究

项目批准号： 91023047

批准年份： 2010

学科分类： E0512.微纳机械系统

项目负责人：朱利民

资助类别：重大研究计划

负责人职称：教授

依托单位：上海交通大学

资助金额： 230万元

关键词：纳米加工系统;约束刻蚀剂层技术;微/纳光学阵列元件;微纳尺度传质;薄层电化学反应

起止时间： 2011-01-01到2014-12-31

中英文摘要
结题摘要
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序号	标题	类型	作者
1	Kinetic investigation on the confined etching system of n？type Gallium arsenide by scanning electrochemical microscopy	期刊论文	Zhang J\|Jia JC\|Han LH\|Yuan Y\|Tian ZQ\|Tian ZW\|Zhan DP\|
2	High-precision control of piezoelectric nanopositioning stages using hysteresis compensator and disturbance observer	期刊论文	Gu GY\|Zhu LM\|Su CY\|
3	Modeling and control of piezo-actuated nanopositioning stages: A survey	期刊论文	Gu GY\|Zhu LM\|Su CY\|Ding H\|Fatikow S\|
4	Identification of Prandtl-Ishlinskii hysteresis models using modified particle swarm optimization	期刊论文	Yang MJ\|Gu GY\|Zhu LM\|
5	Electrochemical micromachining with wet stamping: Instrument design and experimental investigation	期刊论文	Lai LJ\|Zhou H\|Du YJ\|Li CX\|Zhang L\|Jiang LM\|Zhu LM\|
6	An experimental comparison of proportional-integral, sliding mode, and robust adaptive control for piezo-actuated nanopositioning stages	期刊论文	Gu GY\|Zhu LM\|
7	“约束刻蚀-电解”复合加工技术研究	会议论文	蒋利民\|邓文波\|杜裕杰\|眭俊\|田昭武\|田中群\|詹东平\|
8	A digital lock-in amplifier based contact detection technique for electrochemical nanolithography	期刊论文	Zhou SY\|Lai LJ\|Gu GY\|Zhu LM\|
9	Improving Tracking Precision of Piezoceramic Actuators Using Feedforward-Feedback Control	会议论文	Gu GY\|Li CX\|Lai LJ\|Zhu LM\|
10	High Precision Electrochemical Micromachining Based on Confined Etchant Layer Technique	期刊论文	Zhou H\|Du YJ\|Zhang J\|Jia JC\|Jiang LM\|Zhu LM\|Tian ZW\|Tian ZQ\|Zhan DP\|
11	High-bandwidth tracking control of piezo-actuated nanopositioning stages using closed-loop input shaper	期刊论文	Yang MJ\|Gu GY\|Zhu LM\|
12	Electrochemical Micro- and Nano-Fabrication	会议论文	Zhan DP\|Zhou JZ\|Shi K\|Han LH\|Zhang J\|Jia JC\|Yuan Y,\|Tian ZQ\|Tian ZW\|
13	Modeling of rate-dependent hysteresis in piezoelectric actuators using a family of ellipses	期刊论文	Gu GY\|Zhu LM\|
14	A Comprehensive Dynamic Modeling Approach for Giant Magnetostrictive Material Actuators	期刊论文	Gu GY\|Zhu LM\|Li Z\|Su CY\|
15	Robust adaptive control of piezo-actuated positioning stages with an ellipse-based hysteresis model	会议论文	Gu GY\|Zhu LM\|Su CY\|
16	Design and control of a decoupled two degree of freedom translation parallel micro-positioning stage	期刊论文	Lai LJ\|Gu GY\|Zhu LM\|
17	Motion Control of Piezoelectric Positioning Stages: Modeling, Controller Design, and Experimental Evaluation	期刊论文	Gu GY\|Zhu LM\|Su CY\|Ding H\|
18	Development of a Parallel-Kinematic High-Speed XY Nanopositioning Stage	会议论文	Li CX\|Gu GY\|Yang MJ\|Zhu LM\|
19	A novel leveling method based on current feedback mode of scanning electrochemical microscopy	会议论文	Han LH\|Yuan Y\|Zhang J\|Zhan DP\|
20	Electrochemistry at solid/solid interface	会议论文	Zhan DP\|Zhu YL\|Yang DZ\|Tian ZW\|
21	Motion control of piezoelectric positioning stages: modeling, controller design and experimental evaluation	期刊论文	Gu GY\|Zhu LM\|Su CY\|Ding H\|
22	电化学微纳制造	会议论文	詹东平\|杨德志\|韩联欢\|张杰\|
23	Confined etchant layer technique (CELT) for micromanufacture	会议论文	Han LH\|Yang DZ\|Jiang LM\|Tang J\|Sun JJ\|Shi K\|Zhou JZ\|Tian ZQ\|Tian ZW\|
24	Comparative experiments regarding approaches to feedforward hysteresis compensation for piezoceramic actuators	期刊论文	Gu GY\|Zhu LM\|
25	Robust adaptive control of a class of nonlinear systems with inverse compensation of unknown asymmetrical backlash nonlinearity	会议论文	Gu GY\|Zhu LM\|Feng Y\|Su CY\|
26	TiO<sub>2</sub>光催化溴离子还原的扫描电化学显微镜研究	会议论文	贾晶春\|张杰\|韩联欢\|袁野\|田中群\|田昭武\|詹东平\|
27	Design and Analysis of a Spatial Remote Center of Compliance Mechanism	会议论文	Lai LJ\|Gu GY\|Zhou H\|Zhu LM\|
28	SECM studies of confined etchant layer technique	会议论文	Zhang J\|Tian ZQ\|Tian ZW\|Zhan DP\|
29	Motion control of piezoelectric positioning stages: Modeling, controller design and experimental evaluation	期刊论文	Gu GY\|Zhu LM\|Su CY\|Ding H\|
30	微纳制造装备中拱形桥架的结构优化设计	期刊论文	杨梅菊\|赖磊捷\|谷国迎\|朱利民\|
31	Modeling and Compensation of Asymmetric Hysteresis Nonlinearity for Piezoceramic Actuators with a Modified Prandtl-Ishlinskii Model	期刊论文	Gu GY\|Zhu LM\|Su CY\|
32	Confined etchant layer technique (CELT) for supersmooth surface machining	会议论文	Zhan DP\|Shi K\|Zhou JZ\|Han LH\|Zhang L\|Tian ZW\|Tian ZQ\|
33	Integral Resonant Damping for High-bandwidth Control of Piezoceramic Stack Actuators with Asymmetric Hysteresis Nonlinearity	期刊论文	GU GY\|Zhu LM\|Su CY\|
34	Electrochemical microfabrication	会议论文	Zhan D\|Yang D\|Han L\|Zhang J\|Jia J\|
35	Electrochemical microfabrication based on elastic buckling on mold electrode	会议论文	Zhang J\|Han LH\|Jia JC\|Zhan DP\|Tian ZQ\|
36	电化学微／纳米加工技术	期刊论文	贾晶春\|朱益亮\|韩联欢\|袁野\|时康\|周剑章\|田昭武\|田中群\|詹东平\|
37	Robust tracking of nanopositioning stages using sliding mode control with a PID sliding surface	会议论文	Gu GY\|Li CX\|Zhu LM\|Fatikow S\|
38	Development of an electrochemical micromachining instrument for the confined etching techniques	期刊论文	Zhou H\|Lai LJ\|Zhao XH\|Zhu LM\|
39	Real-time inverse hysteresis compensation of piezoelectric actuators with a modified Prandtl-Ishlinskii model	期刊论文	Gu GY\|Yang MJ\|Zhu LM\|
40	Parameter Identification of the Generalized Prandtl-Ishlinskii Model for Piezoelectric Actuators Using Modified Particle Swarm Optimization	期刊论文	Yang MJ\|Gu GY\|Zhu LM\|
41	Improving scanning speed of the AFMs with inversion-based feedforward control	会议论文	Yang MJ\|Li CX\|Gu GY\|Zhu LM\|
42	Physical field modulated electrochemical microfabrication	会议论文	Zhan DP\|Zhang J\|Han LH\|Jia JC\|Yuan Y\|Tian ZW\|
43	电化学微/纳加工技术	期刊论文	贾晶春\|朱益亮\|韩联欢\|袁野\|时康\|周剑章\|田昭武\|田中群\|詹东平\|
44	Design, Analysis and Testing of a Parallel-kinematic High-bandwidth XY Nanopositioning Stage	期刊论文	Li CX\|Gu GY\|Yang MJ\|Zhu LM\|
45	High precision electrochemical micromachining based on confined etchant layer technique	期刊论文	Zhou H\|Du YJ\|Zhang J\|Jia J\|Jiang LM\|Zhu LM\|Tian ZW\|Tian ZQ\|Zhan D\|
46	A Leveling Method Based on Current Feedback Mode of Scanning Electrochemical Microscopy	期刊论文	Zhang J\|Zhao XS\|Cao YZ\|Hu ZJ\|Yan YD\|Dong S\|Tian ZQ\|Tian ZW\|Zhan DP\|
47	A Modified Prandtl-Ishlinskii Model for Rate-dependent Hysteresis Nonlinearity Using mth-power Velocity Damping Mechanism	期刊论文	Yang MJ\|Li CX\|Gu GY\|Zhu LM\|
48	Localized etching kinetics of GaAs coupled with EC process: A SECM investigation	会议论文	Zhang J\|Jia JC\|Tian ZQ\|Tian ZW\|Zhan DP\|
49	三自由度θxθyZ柔性机构的柔度分析与计算	期刊论文	李春霞\|赖磊捷\|朱利民\|
50	Three Dimensional Micromachining on Aluminum Surface by Electrochemical Wet Stamping Technique	期刊论文	Jiang LM\|Du YJ\|Jia JC\|Lai LJ\|Zhou H\|Zhu LM\|Tian ZW\|Tian ZQ\|Zhan DP\|
51	Electrochemical Mechanical Micromachining Based On Confined Etchant Layer Technique	期刊论文	Jia JC\|Zhao XS\|Cao YZ\|Hu ZJ\|Yan YD\|Dong S\|Tian ZQ\|Tian ZW\|Zhan DP\|
52	铝合金电化学加工中的钝化行为及其对加工过程的影响	期刊论文	蒋利民\|邓文波\|应俊龙\|
53	三自由度θxθyZ柔性机构的柔度分析与计算	期刊论文	李春霞\|赖磊捷\|朱利民\|
54	电化学微纳制造	会议论文	詹东平\|杨德志\|韩联欢\|张杰\|
55	Electrochemical nanofabrication	会议论文	Han LH\|Zhang J\|Zhan DP\|Shi K\|Zhou L\|Jiang LM\|Yang DZ\|Tian ZW\|Tian ZQ\|
56	单晶硅表面硝酸银活化化学镀镍工艺	期刊论文	蒋利民\|眭俊\|霍盛\|王洋\|杜裕杰\|
57	Motion Control of Piezoceramic Actuators with Creep, Hysteresis and Vibration Compensation	期刊论文	Gu GY\|Zhu LM\|
58	基于LabVIEW的微纳加工系统设计与研究	期刊论文	赵相晖\|赖磊捷\|朱利民\|
59	Development of an automatic approaching system for electrochemical nanofabrication using visual and force-displacement sensing	期刊论文	Lai LJ\|Zhou SY\|Gu GY\|Zhu LM\|
60	Fabrication of Microstructures on GaAs with Pulsed Electrochemical Wet Stamping	期刊论文	Zhou H\|Lai LJ\|Du YJ\|Zhang L\|Zhu LM\|
61	基于约束刻蚀剂层技术的电化学机械加工	会议论文	袁野\|韩联欢\|张杰\|贾晶春\|田中群\|詹东平\|
62	铁氧化物<b>-</b>氯化钠固态溶液微晶体的合成及其电化学性质	会议论文	朱益亮\|王芳芳\|詹东平\|
63	Development of a smart motion control card with an IEEE-1394 interface	会议论文	Gu GY\|Zhu LM\|Feng Y\|
64	Design of a decoupled 2-dof translational parallel micro-positioning stage	会议论文	Lai LJ\|Gu GY\|Li PZ\|Zhu LM\|
65	Combinatorial screening of photoelectrocatalytic system with high signal/noise ratio	期刊论文	Yuan D\|Xiao L\|Jia JC\|Zhang J\|Han LH\|Li P\|Mao B\|Zhan DP\|
66	Design of a distributed multiaxis motion control system using the IEEE-1394 bus	期刊论文	Gu GY\|Zhu LM\|Xiong ZH\|Ding H\|
67	Solid-solid interface: Construction and electrochemistry	会议论文	Zhan DP\|Zhu YL\|Yang DZ\|
68	Proxy-based sliding mode tracking control of piezoelectric-actuated nanopositioning stages	期刊论文	Gu GY\|Zhu LM\|Su CY\|Ding H\|Fatikow S\|
69	常温磷化过程中的开路电位-时间曲线以及成膜规律	期刊论文	蒋利民\|杨永生\|蒋熙云\|邓文波\|王汉丹\|
70	Integral resonant damping for high-bandwidth control of piezoceramic stack actuators with asymmetric hysteresis nonlinearity	期刊论文	Gu GY\|Zhu LM\|Su CY\|

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