可控介质微球阵列光场调制实现高效超分辨三维测量方法研究

61875201
2018
F0513.微纳光子学
胡松
面上项目
研究员
中国科学院光电技术研究所
65万元
介质微球;并行测量;光场调制;微纳测量
2019-01-01到2022-12-31
  • 中英文摘要
  • 结题摘要
  • 结题报告
  • 项目成果
  • 项目参与人
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序号 标题 类型 作者
1 Large Gradient Micro-Structure Topography Measurement with Multi-Angle Stitching Digital Holographic Microscope 期刊论文 Jin Chuan;Yu He;Yan Tang;Zhongye Xie;Zhao Lixin;Song Hu
2 Global optimisation of source and mask in inverse lithography via tabu search combined with genetic algorithm 期刊论文 Haifeng Sun;Jing Du;Chuan Jin;Haiyang Quan;Yanli Li;Yan Tang;Jian Wang;Song Hu;Junbo Liu
3 一种基于调制度半宽恒定的自校准结构光测量方法 专利 刘磊;唐燕;赵立新;胡松
4 Single-exposure modulation-based structured illumination microscopy using spatial area phase-shift 期刊论文 Zhongye Xie;Yan Tang;Qinyuan Deng;Jinghua Sun;Yu He;Song Hu
5 全局曲线拟合实现高厚度检测分辨力的结构光照明显微术 期刊论文 杨可君;韩陈浩磊;刘磊;冯金花;谢仲业;胡松;唐燕
6 Global Source Optimisation Based on Adaptive Nonlinear Particle Swarm Optimisation Algorithm for Inverse Lithography 期刊论文 Haifeng Sun;Du Jing;Chuan Jin;Jinhua Feng;Jian Wang;Song Hu;Junbo Liu
7 Accurate surface profilometry using differential optical sectioning microscopy with structured illumination 期刊论文 Zhongye Xie;Yan Tang;Jinhua Feng;Junbo Liu;Song Hu
8 Fast structured illumination microscopy with a large dynamic measurement range 期刊论文 Chenhaolei Han;Yan Tang;Zhongye Xie;Lei Liu;Jinhua Feng;Song Hu
9 Self-Calibrated Measurement Method Based on Structured Illumination Microscopy 期刊论文 Lei Liu;Yan Tang;Haojie Wei;Yu He;Song Hu
10 一种自动交接的多尺寸硅片传输装置 专利 兰俊;杨勇;唐燕;赵立新;胡松
11 Efficient Profilometry Using Tilted Grating Scanning Structured Illumination Microscopy 期刊论文 Haojie Wei;Song Hu;Yan Tang;Zhongye Xie;Xi Liu;Yu He;Junbo Liu
12 Optical Sectioning Microscopy For Multilayer Structure With Micro-Scale Air Gaps Measurement 期刊论文 Zhongye Xie;Yan Tang;Haojie Wei;Junbo Liu;Yu He;Song Hu
13 Spatial Consistency Calibration Based on Phase Difference Minimization for Parallel Slightly Off-Axis Digital Holographic Microscopy 期刊论文 Chuan Jin;Yu He;Yan Tang;Junbo Liu;Haifeng Sun;Song Hu
14 一种基于复合光栅的结构光微纳结构三维检测方法 专利 位浩杰;唐燕;谢仲业;刘磊;赵立新;胡松
15 一种大梯度自由曲面测量方法 专利 金川;何渝;唐燕;冯金花;胡松;赵立新
16 基于结构光调制的快速超分辨成像方法 专利 杨可君;陈楚怡;谢仲业;周毅;刘锡;唐燕;赵立新;胡松
17 Application of structured illumination microscopy in fast and accurate measurement of complex-surface and steep-edge 会议论文 Lei Liu;Tang Yan;Song Hu
18 Evaluation of the Large-Length Indoor Standard Installation Based on Single Point Scanning 期刊论文 Hu Chang'an;Hu Song;Sun Haifeng;Liu Junbo;Li Jiangang;Yang Zhuang
19 A novel coaxial focus position detection technique based on differential modulation evaluation for laser direct photolithography 期刊论文 Chenhaolei Han;Yan Tang;Xiaolong Cheng;Haifeng Sun;Jinhua Feng;Song Hu
20 Dose-modulated maskless lithography for the efficient fabrication of compound eyes with enlarged field-of-view 期刊论文 Jianghui Liu;Junbo Liu;Qingyuan Deng;Xi Liu;Yu He;Yan Tang;Song Hu
21 Fast surface profilometry utilizing structured illumination microscopy based on the time-domain phase-shift technique 期刊论文 Lei Liu;Yan Tang;Zhongye Xie;Jinhua Feng;Yu He;Song Hu
22 Film Thickness-Profile Measurement Using Iterative Peak Separation Structured Illumination Microscopy 期刊论文 Yang Kejun;Han Chenhaolei;Feng Jinhua;Tang Yan;Xie Zhongye;Hu Song
23 Intensity modulation based optical proximity optimization for the maskless lithography 期刊论文 Jianghui Liu;Junbo Liu;Qingyuan Deng;Jinhua Feng;Shaolin Zhou;Song Hu
24 一种光学元件轴向微动调整装置 专利 康霞;杜婧;周吉;刘文静;路雨桐;程阳洋;胡松;赵立新
25 光刻投影物镜中动镜X-Y向柔性调节机构设计 期刊论文 杨超;朱咸昌;金川;胡松
26 3D Super-Resolution Reconstruction Using Microsphere-Assisted Structured Illumination Microscopy 期刊论文 Xie Zhongye Hu Song Tang Yan Liu Xi Liu Junbo;He Yu
27 Profilometry With Enhanced Accuracy Using Differential Structured Illumination Microscopy 期刊论文 Zhongye Xie;Yan Tang;Xi Liu;Junbo Liu;Yu He;Song Hu
28 一种适用于无掩模数字光刻的邻近效应校正方法 专利 刘江辉;刘俊伯;赵立新;唐燕;胡松
29 一种接近接触式光刻真空曝光工件台装置 专利 龚健文;胡松;于军胜;赵立新;杨勇;杜婧
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