新型微型硅曲面壳形陀螺谐振结构的基础理论研究

61434003
2014
F0407.微纳机电器件与控制系统
郭述文
重点项目
教授
苏州大学
350万元
微型硅曲面壳形;硅谐振子;MEMS陀螺传感器
2015-01-01到2019-12-31
  • 中英文摘要
  • 结题摘要
  • 结题报告
  • 项目成果
  • 项目参与人
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序号 标题 类型 作者
1 Effective bias warm-up time reduction for MEMS gyroscopes based on active suppression of the coupling stiffness 期刊论文 Cui Jian;Zhao Qiancheng;Yan Guizhen
2 Shortening Bias Warm-Up Time with Active Control of the Coupling Stiffness for Mems Gyroscopes 会议论文 Cui Jian;Zhao Qiancheng;Wang Yinpeng;Yan Guizhen
3 Research on the resonant frequency of MEMS gyroscopes under varying tuning voltage 会议论文 Yan Ruixuan;Wei Xianglei;He Chunhua;Zhao Qiancheng;Yang Zhenchuan;Yan Guizhen
4 Automatic Mode-Matching and Scale Factor Adjustable Detection System for Force to Rebalance Control of Cobweb-Like Gyroscopes 会议论文 Cheng Mengmeng;Guo Shuwen;Fan Bo;Wan Quan;Wen Zuxiang;Xu Dacheng
5 微机械轮式角振动陀螺气体阻尼特性研究 期刊论文 陈奥运;凤瑞;庄须叶;徐大诚;郭述文
6 Initial frequency split reduction of MEMS ring gyroscope based on cascaded springs geometrical compensation 期刊论文 Bai Zesen;Cui Jian;Zhao Qiancheng;Yang Zhenchuan;Yan Guizhen
7 Geometric Compensation of (100) SCS Vibrating Ring Gyroscope for Mode-Matching Achieving High Immunity to Fabrication Imperfections 会议论文 Bai Zesen;Cui Jian;Zhao Qiancheng;Wang Yinpeng;Yang Zhenchuan
8 硅微角振动陀螺仪温度特性补偿方法研究 期刊论文 余磊;徐大诚;郭述文
9 Effect of circuit phase delay on bias stability of MEMS gyroscope under force rebalance detection and self-compensation method 期刊论文 Bu Feng;Guo Shuwen;Cheng Mengmeng;Zheng Fen;Xu Dacheng;Zhao Heming
10 A Silicon Resonant Accelerometer Embedded in An Isolation Frame with Stress Relief Anchor 期刊论文 Cui Jian;Yang Haibing;Li Dong;Song Ziyang;Zhao Qiancheng
11 A Dual Quantization Electromechanical Sigma-delta Modulator Vibratory Wheel Gyroscope 会议论文 Sheng Bin;Chen Fang;Qian Chao;Xu Dacheng;Guo Shuwen;Li Xinxin
12 A novel method to measure the sidewall angle of MEMS structures 会议论文 Qin Qiang;Zhao Qiancheng;Yang Fang;Zhang Dacheng;Yan Guizhen
13 Frequency Symmetry Comparison of Cobweb-Like Disk Resonator Gyroscope With Ring-Like Disk Resonator Gyroscope 期刊论文 Fan Bo;Guo Shuwen;Cheng Mengmeng;Yu Lei;Zhou Ming;Hu Wenyan;Zheng Fen;Bu Feng;Xu Dacheng
14 Enhanced temperature stability of scale factor in MEMS gyroscope based on multi parameters fusion compensation method 期刊论文 Cui Jian;Yan Guizhen;Zhao Qiancheng
15 一种高深宽比高对称性高光滑表面度硅微半球曲面的制备系统及其工艺方法 专利 白泽森;赵前程;王银鹏;杨振川
16 一种硅微陀螺的闭环检测系统 专利 徐大诚;盛斌;卢月娟;钱超
17 一种几何补偿式的(100)硅微环形谐振陀螺 专利 白泽森;崔健;杨振川;赵前程
18 Study on the influence induced by electrical coupling among interconnection lines in MEMS gyroscopes 会议论文 Li M.J.;Wang Y.P.;Zhao Q.C.;He C.H.;Lin L.T.;Yang J.F.;Yan G.Z.
19 A high symmetry polysilicon micro hemispherical resonating gyroscope with spherical electrodes 会议论文 Wan Quan;Gu Honghua;Fan Bo;Zhao Heming;Xu Dacheng;Guo Shuwen
20 A novel scale factor calibration method for a MEMS gyroscope based on virtual coriolis force 会议论文 Zhang Jimeng;He Chunhua;Liu Yuxian;Liu Dachuan;Zhao Qiancheng;Yang Zhenchuan;Yan Guizhen
21 A novel robust design method for the sense mode of a MEMS vibratory gyroscope based on fuzzy reliability and Taguchi design 期刊论文 He ChunHua;Zhao QianCheng;Huang QinWen;Lin LongTao;Yang ZhenChuan;Zhang DaCheng;Yan GuiZhen
22 A Novel High-Symmetry Cobweb-Like Disk Resonator Gyroscope 期刊论文 Fan Bo;Guo Shuwen;Cheng Mengmeng;Yu Lei;Zhou Ming;Hu Wenyan;Chen Zi'Ang;Xu Dacheng
23 Enhancing the closed-loop stability of a high-Q polysilicon micro-hemispherical resonating gyroscope 期刊论文 Wan Quan;Chen Fang;Xu Dacheng;Guo Shuwen;Li Xinxin
24 一种硅微陀螺数字化驱动闭环控制系统 专利 徐大诚;钱超;盛斌;程梦梦;卢月娟
25 单芯片多敏感单元的中心轴对称MEMS陀螺仪 专利 郭述文;周铭;樊波
26 具有频差调节结构的中心轴对称谐振陀螺仪 专利 郭述文;胡文艳
27 一种硅微鸟盆式谐振陀螺仪及其制备方法 专利 王银鹏;白泽森;赵前程;杨振川;闫桂珍
28 Research on the packaging reliability and degradation models of quality factors for a high vacuum sealed MEMS gyroscope 会议论文 He C.H.;Wang Y.P.;Huang Q.W.;Zhao Q.C.;Yang Z.C.;Zhang D.C.;Yan G.Z.
29 An electrical-coupling-suppressing MEMS gyroscope with feed-forward coupling compensation and scalable fuzzy control 期刊论文 He Chunhua;Zhang Jimeng;Zhao Qiancheng;Huang Qinwen;Yang Zhenchuan;Zhang Dacheng;Yan Guizhen
30 Investigation of air damping in different vibrational modes of lateral-axis gyroscopes 会议论文 Fan Bo;Chen Aoyun;Hu Wenyan;Zheng Fen;Xu Dacheng;Guo Shuwen
31 Design of a Dual Quantization Electromechanical Sigma-Delta Modulator MEMS Vibratory Wheel Gyroscope 期刊论文 Sheng Bin;Chen Fang;Qian Chao;Xu Dacheng;Guo Shuwen;Li Xinxin
32 MEMS gyroscope automatic real-time mode-matching method based on phase-shifted 45◦additional force demodulation  期刊论文 Bu Feng;Xu Dacheng;Zhao Heming;Fan Bo;Cheng Mengmeng
33 基于参数激励的MEMS陀螺电馈通抑制方法 期刊论文 赵鹤鸣;郑奋;程梦梦;徐大诚;郭述文
34 A Novel Sixteen-Sided Cobweb-Like Disk Resonator Gyroscope with Low As-Fabricated Frequency Split between Drive and Sense Modes 会议论文 Fan Bo;Guo Shuwen;Yu Lei;Cheng Mengmeng;Zhou Ming;Hu Wenyan;Zheng Fen;Xu Dacheng
35 A temperature control system used for improving resonant frequency drift of MEMS gyroscopes 会议论文 Guan Rui;He Chunhua;Liu Dachuan;Zhao Qiancheng;Yang Zhenchuan;Yan Guizhen
36 低噪声硅微陀螺敏感电容电荷读出电路设计 期刊论文 卢月娟;徐大诚;郭述文
37 一种硅微环形谐振陀螺的刚性主轴定位与激光平衡匹配算法 专利 白泽森;崔健;杨振川;赵前程
38 一种基于图形化补偿的模态匹配式微机械Z轴环形谐振陀螺 专利 白泽森;杨振川;崔健;赵前程;闫桂珍
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