基于气流转子的六自由度MEMS惯性传感器研究

61273052
2012
F0303.系统建模理论与仿真技术
常洪龙
面上项目
教授
西北工业大学
80万元
微机电系统;惯性传感器;陀螺;气流转子;六轴传感器
2013-01-01到2016-12-31
  • 中英文摘要
  • 结题摘要
  • 结题报告
  • 项目成果
  • 项目参与人
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序号 标题 类型 作者
1 A micromachined fluidic reduced inertial measurement unit using thermal expansion flow principle 会议论文 X.H. Gong|B. Nie|W.Z. Yuan|H.L. Chang|
2 A Virtual Gyroscope Based-on a Single-Chip Four-Microgyroscope Array 会议论文 Yuan Weizheng|Qu Beini|Xie Jianbin|Chang Honglong|
3 A Global Maximum Error Controller-Based Method for Linearization Point Selection in Trajectory Piecewise-Linear Model Order Reduction 期刊论文 Liu Ying|Yuan Weizheng|Chang Honglong|
4 Bias Contribution Modeling for a Symmetrical Micromachined Coriolis Vibratory Gyroscope 期刊论文 He Li|Yongcun Hao|Weizheng Yuan|Honglong Chang|
5 A Novel Resonant Accelerometer Based On Mode Localization Of Weakly coupled Resonators 会议论文 B.Y. Li|Y.C. Hao|M. Kraft|H.L. Chang|
6 Compact thermoelectric coupled models of micromachined thermal sensors using trajectory piecewise-linear model order reduction 期刊论文 Liu Ying|Yuan Weizheng|Chang Honglong|Ma Binghe|
7 Development of a Tri-Axis Vortex Convective Gyroscope with Suspended Silicon Thermistors 会议论文 Pingwei Zhou|Xianghui Gong|Jianbin Xie|Weizheng Yuan|
8 Design and Implementation of an Optimized Double Closed-Loop Control System for MEMS Vibratory Gyroscope 期刊论文 Chang Honglong|Yuan Guangmin|Xie Jianbing|Kraft Michael|
9 Theoretical Modeling for a Six-DOF Vortex Inertial Sensor and Experimental Verification 期刊论文 Xie Zhongjian|Gong Xianghui|Yang Yong|Yuan Weizheng|
10 Notching效应在MEMS风速仪制造工艺中的应用 期刊论文 谢建兵|杨勇|谢中建|袁广民|
11 Low Noise Vacuum Mems Closed-Loop Accelerometer Using Sixth-Order Multi-Feedback Loops and Local Resonator Sigma Delta Modulator 会议论文 Yuan Weizheng|Chang Honglong|Ioannis Zeimpekis|Michael Kraft|
12 On Improving the Performance of a Tri-axis Vortex Convective Gyroscope Through Suspended Silicon Thermistors 期刊论文 Gong Xianghui|Wang Shasha|Zhou Pingwei|Yuan Weizheng|
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