波瓣式微壳体振动陀螺结构设计理论及其制造方法研究

51505490
2015
E0512.微纳机械系统
侯占强
青年科学基金项目
副研究员
中国人民解放军国防科技大学
21万元
结构设计;波瓣式;制造方法;微壳体陀螺
2016-01-01到2018-12-31
  • 中英文摘要
  • 结题摘要
  • 结题报告
  • 项目成果
  • 项目参与人
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序号 标题 类型 作者
1 Micro Shell Resonator with T-Shape Masses Fabricated by Improved Process Using Whirling Platform and Femtosecond Laser Ablation 会议论文 Lu Kun;Li Wei;Xiao Dingbang;Hou Zhanqiang;Shi Yan;Wu Xuezhong;Wu Yulie
2 Fused Silica Micro Shell Resonator With T-Shape Masses for Gyroscopic Application 期刊论文 Xiao Dingbang;Li Wei;Hou Zhanqiang;Lu Kun;Shi Yan;Wu Yulie;Wu Xuezhong
3 A new fabrication process of TGV substrate with silicon vertical feedthroughs using double sided glass in silicon reflow process 期刊论文 Li Wenyin;Xiao Dingbang;Wu Xuezhong;Hou Zhanqiang;Chen Zhihua;Wang Xinghua;Zhou Jian
4 Micro Shell Resonator with T-shape Masses for Improving out-of-plane ElectrostaticTransduction Efficiency 会议论文 Li Wei;Lu Kun;Xiao Dingbang;Hou Zhanqiang;Shi Yan;Wu Xuezhong;Wu Yulie
5 DECOUPLING DESIGN OF STIFFNESS AND MASS FOR MICRO SHELL RESONATOR WITH HIGH SENSITIVITY 会议论文 Li Wei;Hou Zhanqiang;Xiao Dingbang;Lu Kun;Shi Yan;Wu Yulie;Wu Xuezhong
6 微壳体振动陀螺及其制备方法 专利 肖定邦;吴学忠;侯占强;李微;陈志华;吴宇列;卢坤;石岩
7 Effective mechanical trimming of micro shell resonator with t-shape masses 会议论文 Kun Lu;Wei Li;Zhanqiang Hou;Dingbang Xiao;Yulie Wu;Xuezhong Wu;Ming Zhuo
8 Characterization of signal transfer performance of a through glass via (TGV) substrate with silicon vertical feedthroughs 期刊论文 Li Wenyin;Wu Xuezhong;Xiao Dingbang;Hou Zhanqiang;Chen Zhihua;Wang Xinghua;Zhou Jian
9 Enhanced temperature stability of sensitivity for MEMS gyroscope based on frequency mismatch control 期刊论文 Li Wenyin;Xiao Dingbang;Wu Xuezhong;Su Jianbin;Chen Zhihua;Hou Zhanqiang;Wang Xinghua
10 Investigation on precise frequency trimming of a micro shell resonator with T-shape masses using lowpower femtosecond laser ablation 会议论文 Kun Lu;Yan Shi;Dingbang Xiao;Zhanqiang Hou;Wei Li;Xuezhong Wu;Yulie Wu
11 一种高精度熔融石英微壳体谐振结构加工设备 专利 肖定邦;吴学忠;侯占强;陈志华;吴宇列;李微;石岩;卢坤
12 周期化微壳体谐振结构及其制备方法 专利 侯占强;吴学忠;肖定邦;陈志华;李微;吴宇列;卢坤;石岩
13 Application of micro-blowtorching process with whirling platform for enhancing frequency symmetry of microshell structure 期刊论文 Wei Li;Zhanqiang Hou;Yan Shi;Kun Lu;Xiang Xi;Yulie Wu;Xuezhong Wu;Dingbang Xiao
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