GHz频率机械耦合阵列组合的盘结构电容式微机械谐振器关键技术研究

61376117
2013
F0407.微纳机电器件与控制系统
董林玺
面上项目
教授
杭州电子科技大学
81万元
微机械谐振器;惯性冲击;阻尼;品质因子;阵列组合
2014-01-01到2017-12-31
  • 中英文摘要
  • 结题摘要
  • 结题报告
  • 项目成果
  • 项目参与人
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序号 标题 类型 作者
1 The slope effect of a capacitive resonator profile fabricated by a DRIE process on the performance of an MEMS disk resonator 期刊论文 董林玺;俞权;包金艳;陶家平
2 Modeling and Characterization of Coaxial Through-Silicon Via With Electrically Floating Inner Silicon 期刊论文 Zhao Wen-Sheng;Zheng Jie;Wang Jing;Liang Feng;Wen Fei;Dong Linxi;Wang Dingwen;Wang Gaofeng
3 Study of the influence of fringe edge on MEMS capacitive accelerometers self-calibration 期刊论文 Dong Linxi;Pan Ying;Lou Jinfeng;Bao Jinyan
4 Investigation of Copper–Carbon Nanotube Composites as Global VLSI Interconnects 期刊论文 Zi-Han Cheng;Wen-Sheng Zhao;Linxi Dong
5 Strain redistribution in free-standing bridge structure released from strained silicon-on-insulator 期刊论文 Sun Gaodi;Zhang Miao;Xue Zhongying;Guo Qinglei;Chen Da;Mu Zhiqiang;Dong Linxi;Wang Xi;Di Zengfeng
6 The WSN Monitoring System for Large Outdoor Advertising Boards Based on ZigBee and MEMS Sensor 期刊论文 Haonan Wang;Linxi Dong
7 MEMS圆盘谐振器形变对电气刚度影响分析 期刊论文 董林玺;俞权;包金艳;陶家平
8 Anchor Loss Variation in MEMS Wine-Glass Mode Disk Resonators Due to Fluctuating Fabrication Process 期刊论文 Dong Linxi;Tao Jiaping;Bao Jinyan;Zhao Wen-Sheng;Wang Gaofeng
9 MEMS圆盘谐振器形变对电气刚度影响分析 期刊论文 董林玺;俞权;包金艳;陶家平
10 一种带自标定振动台的电容式加速度传感器 专利 王耀田;董林玺
11 电极横向可动的微机械圆盘谐振器 专利 董林玺;俞权
12 低驱动电压的微型冲击锤 专利 董林玺;李豪
13 A MEMS Capacitive Inertial Sensor with Near Nanoscale Capacitance Plate Spacing 期刊论文 Dong Linxi;Pan Ying;Su Chuntang;Wang Xiaodi
14 The Effects of the Offsets of the MEMS Wine-Glass Resonator on the Quality Factor 会议论文 Linxi Dong;Jinyan Bao
15 Reliable operation conditions of MEMS capacitive disk resonator fabricated by deep RIE process under step and shock signals 期刊论文 Dong Linxi;Li Hao;Bao Jinyan;Yu Quan;Tao Jiaping
16 倾斜梳齿的MEMS电容式加速度传感器自我标定特性研究 期刊论文 董林玺;楼进峰
17 Analysis of reliability factors of MEMS disk resonator under the strong inertial impact 期刊论文 董林玺;俞权
18 Strain analysis of free-standing strained silicon-on-insulator nanomembrane 期刊论文 Sun Gao-Di;Dong Lin-Xi;Xue Zhong-Ying;Chen Da;Guo Qing-Lei;Mu Zhi-Qiang
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