化学机械平坦化过程中抛光垫表面结构对抛光液传递效率的作用机制
序号 | 标题 | 类型 | 作者 |
---|---|---|---|
1 | Numerical simulation and experimental research on the comprehensive performance of the shell side of the spiral wound heat exchanger | 期刊论文 | Jinxing Wu;Qianhui Tian;Xuezhen Sun;Jinyuan Zhao;Lei Wang;Xu Peng;Xiaoyan Liao |
2 | Study on the Mechanism of Micro-Defect Reduction during Si Final Polishing withWater-Soluble Polymers | 期刊论文 | Yanlei Li;Yangang He;ChenWei Wang;Ming Sun;Jianwei Sun;Baohong Gao;Xiaoyan Liao |